Trapezoidal zone plate with quasi-single-stage focusing

A quasi-single-stage focusing and trapezoidal waveband technology, applied in optics, instruments, optical components, etc., can solve the problem of unfavorable acquisition of etched zone plate layout data, low efficiency of electron beam writing equipment, and difficulty in achieving self-support, etc. problems, to achieve the effect of easy practical promotion and application, ingenious design, and elimination of sharp corners

Inactive Publication Date: 2018-08-14
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Most of the existing binary Gabor zone plates have a large number of sectors and a large number of small sharp corners. During production and processing, the randomness and discreteness of the distribution of a large number of primitives makes the work efficiency of the electron beam writing equipment low, and Also not conducive to obtaining zone plate layout data for etching
For the processing of components with too high discrete elements such as random lattice zone plates, a large-area substrate is required, and the substrate will cause a large amount of X-ray absorption, which is not conducive to its application
[0007] In summary, the existing binary Gabor zone plates are not only difficult to achieve self-support, but also difficult to process and manufacture, and most of them are difficult to realize the application in the extreme ultraviolet and X-ray bands

Method used

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  • Trapezoidal zone plate with quasi-single-stage focusing
  • Trapezoidal zone plate with quasi-single-stage focusing
  • Trapezoidal zone plate with quasi-single-stage focusing

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0043] The invention provides a trapezoidal zone plate with quasi-single-stage focusing characteristics, which is mainly composed of a light-tight base and several ring-shaped zones. Such as figure 2As shown, one of the trapezoidal zone plates in the present invention has a structure designed as follows: ten annular wave zones are used, and all the annular wave zones are arranged in sequence from inside to outside with the center of the base as the center of the circle, and the radial dimension of the zone plate is given by From inside to outside is limited by the half-wave radius formula of the Fresnel zone plate, and the size of each sector of the zone plate depends on the number of tangential trapezoids. A single annular wave zone includes at least two trapezoidal hole light-transmitting primitives that are twisted into a helical shape by isosceles trapezoidal hole light-transmitting primitives, and are sequentially connected in the same direction (that is, the spiral trap...

example 1

[0051] Example 1: Preparation of quasi-single-stage focusing zone plate with transmissive trapezoidal holes

[0052] Proceed as follows:

[0053] a: Determine the zone plate parameters (depending on different wavelengths)

[0054] The soft X-ray wavelength is several nanometers to tens of nanometers, and the first ring radius R of the zone plate is selected 1 =100um, the total number of rings of the zone plate is N=2500, then the diameter of the zone plate is D=1cm, the equivalent outermost ring width is about 1um, and the actual minimum size of the trapezoidal hole needs to be determined by the ratio of the top edge to the bottom edge of the source trapezoid ;

[0055] b: will be as Figure 4 The single trapezoidal hole zone plate with the structure shown in the figure obtains the binary transmittance distribution data of the zone plate according to the parameters in step a, and converts it into a LEDIT format file;

[0056] c: Coating a layer of gold film on the double-s...

example 2

[0061] Example 2: Preparation of X-ray Lithography Replicated Zone Plates

[0062] Proceed as follows:

[0063] a: same as step c in the above example 1;

[0064] b: use the mask produced in Example 1 as the original exposure image, and perform X-ray exposure on the film produced in step a;

[0065] c: same as step e in the above example 1;

[0066] d: The photoresist is removed to obtain a replica of the trapezoidal zone plate with quasi-single-stage focusing properties.

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Abstract

The invention discloses a trapezoidal wave zone plate with a quasi-single-stage focusing characteristic. The trapezoidal wave zone plate comprises a light-proof substrate and a plurality of ring-shaped wave zones which are sequentially arranged from inside to outside by taking the substrate as a center, wherein each ring-shaped wave zone comprises at least two spiral trapezoidal hole light transmission units which are formed by twisting isosceles-trapezoid-shaped hole light transmission units, and are sequentially connected; the radial light transmittance of the wave zone plate meets a formula shown in the description. Compared with a common Fresnel wave zone plate, the trapezoidal wave zone plate can restrain the diffraction efficiency of a senior focus very well, also can reduce the peak strength of the senior focus. Moreover, when a ratio of the top edge of the original trapezoid to the bottom edge of the original trapezoid is equal to 1 to 5, the trapezoidal wave zone plate further has the effect of eliminating a 3n-level focus, and also restrains the efficiency of a 5-level focus to 0.16% of a 1-level focus (insulating efficiency being 6.93%). Compared with a Gabor wave zone plate, the 1-level focus efficiency is higher than the focusing efficiency of the Gabor wave zone plate, and the trapezoidal wave zone plate is easier to manufacture in comparison with a plurality of binaryzation Gabor wave zone plates.

Description

technical field [0001] The invention relates to the field of diffraction focusing elements, in particular to a trapezoidal zone plate with quasi-single-stage focusing characteristics. Background technique [0002] Like X-ray spectral diagnostic technology, X-ray imaging technology is also an important detection method in laser fusion research, and it is the most intuitive way for real-time diagnosis of deuterium-tritium target ball compression in indirect drive inertial confinement fusion. In the X-ray band, due to the absorption of X-rays by the material and the refractive index close to 1, the optical lens commonly used for focusing imaging is no longer suitable. [0003] In 1871, Rayleigh invented the Fresnel zone plate (FZP), which is composed of a series of concentric ring half-wave bands with alternating light and dark, and relies on diffraction to achieve focusing. It is often used to focus X-rays. However, the low efficiency and multi-focus characteristics of FZP al...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/18
CPCG02B5/1876G02B5/1885
Inventor 曹磊峰彭倩范全平王心怡魏来钱凤张强强韩丹
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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