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Trapezoidal wave zone plate with quasi-single-stage focusing characteristic

A quasi-single-stage focusing and trapezoidal waveband technology, applied in optics, instruments, optical components, etc., can solve problems such as unfavorable applications, unfavorable acquisition of etched zone plate layout data, and difficulty in achieving self-support

Inactive Publication Date: 2016-08-17
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Most of the existing binary Gabor zone plates have a large number of sectors and a large number of small sharp corners. During production and processing, the randomness and discreteness of the distribution of a large number of primitives makes the work efficiency of the electron beam writing equipment low, and Also not conducive to obtaining zone plate layout data for etching
For the processing of components with too high discrete elements such as random lattice zone plates, a large-area substrate is required, and the substrate will cause a large amount of X-ray absorption, which is not conducive to its application
[0007] In summary, the existing binary Gabor zone plates are not only difficult to achieve self-support, but also difficult to process and manufacture, and most of them are difficult to realize the application in the extreme ultraviolet and X-ray bands

Method used

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  • Trapezoidal wave zone plate with quasi-single-stage focusing characteristic
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  • Trapezoidal wave zone plate with quasi-single-stage focusing characteristic

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0043] The present invention provides a trapezoidal zone plate with quasi-single-stage focusing characteristics, which is mainly composed of an opaque substrate and a plurality of ring-shaped zone plates. Such as figure 2 As shown, one of the trapezoidal wave zones of the present invention is designed as follows: ten ring wave zones are used, all ring wave zones are arranged in order from the inside to the outside with the center of the base as the center, and the radial size of the zone plate is determined by The inside to outside is limited by the half-band radius formula of the Fresnel zone plate, and the size of each sector of the zone plate depends on the number of tangential trapezoids. A single ring wave zone includes at least two trapezoidal hole light-transmitting elements that are both twisted into a spiral by isosceles trapezoidal hole light-transmitting elements, and they are sequentially connected in the same direction (that is, the spiral trapezoidal hole element ...

example 1

[0051] Example 1: Preparation of transmissive trapezoidal hole quasi-single-stage focusing zone plate

[0052] Proceed as follows:

[0053] a: Determine the parameters of the zone plate (depending on different wavelengths)

[0054] The wavelength of soft X-rays is from a few nanometers to tens of nanometers, and the radius of the first ring of the zone plate R 1 =100um, the total number of zone plates N = 2500, then the zone plate diameter D = 1cm, the equivalent outermost ring width is about 1um, the actual minimum size of the trapezoid hole also needs to be determined by the ratio of the top side and the bottom side of the source trapezoid ;

[0055] b: Will be as Figure 4 The single trapezoidal hole zone plate of the shown structure obtains the binarized transmittance distribution data of the zone plate according to the parameters in step a, and converts it into an LEDIT format file;

[0056] c: Plating a layer of gold film on a double-sided polished (100) crystal face silicon wafe...

example 2

[0061] Example 2: Preparation of X-ray lithography replication zone plate

[0062] Proceed as follows:

[0063] a: Same as step c in Example 1 above;

[0064] b: Use the mask produced in Example 1 as the original exposure image, and perform X-ray exposure on the film produced in step a;

[0065] c: Same as step e in Example 1 above;

[0066] d: The photoresist is removed to obtain a replica zone plate of a trapezoidal zone plate with quasi-single-stage focusing characteristics.

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Abstract

The invention discloses a trapezoidal wave zone plate with a quasi-single-stage focusing characteristic. The trapezoidal wave zone plate comprises a light-proof substrate and a plurality of ring-shaped wave zones which are sequentially arranged from inside to outside by taking the substrate as a center, wherein each ring-shaped wave zone comprises at least two spiral trapezoidal hole light transmission units which are formed by twisting isosceles-trapezoid-shaped hole light transmission units, and are sequentially connected; the radial light transmittance of the wave zone plate meets a formula shown in the description. Compared with a common Fresnel wave zone plate, the trapezoidal wave zone plate can restrain the diffraction efficiency of a senior focus very well, also can reduce the peak strength of the senior focus. Moreover, when a ratio of the top edge of the original trapezoid to the bottom edge of the original trapezoid is equal to 1 to 5, the trapezoidal wave zone plate further has the effect of eliminating a 3n-level focus, and also restrains the efficiency of a 5-level focus to 0.16% of a 1-level focus (insulating efficiency being 6.93%). Compared with a Gabor wave zone plate, the 1-level focus efficiency is higher than the focusing efficiency of the Gabor wave zone plate, and the trapezoidal wave zone plate is easier to manufacture in comparison with a plurality of binaryzation Gabor wave zone plates.

Description

Technical field [0001] The invention relates to the field of diffractive focusing elements, in particular to a trapezoidal zone plate with quasi-single-stage focusing characteristics. Background technique [0002] Like X-ray spectroscopy diagnostic technology, X-ray imaging technology is also an important detection method in laser fusion research. It is the most intuitive way to diagnose the compression of the deuterium-tritium target ball in indirect drive inertial confinement fusion. In the X-ray band, due to the absorption of X-ray by the material and the refractive index close to 1, the optical lens commonly used for focusing and imaging is no longer suitable. [0003] In 1871, Rayleigh invented the Fresnel Zone Plate (FZP), which is composed of a series of concentric circular half-wave zones with alternating light and dark phases. It relies on diffraction to achieve focusing and is often used to focus X-rays. However, the low efficiency and multi-focus characteristics of FZP ...

Claims

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Application Information

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IPC IPC(8): G02B5/18
CPCG02B5/1876G02B5/1885
Inventor 曹磊峰彭倩范全平王心怡魏来钱凤张强强韩丹
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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