The invention discloses a method for eliminating a shaft corner at the top end of a groove. The method comprises the steps of 1, enabling
oxide-
nitride-
oxide (ONO) to grow, 2, enabling the ONO to be etched, 3, enabling the groove to be etched, wherein the ONO serves as
hard mask for
dry etching, 4, enabling middle
silicon nitride of the
hard mask to be etched by a transverse wet method, wherein the sharp corner at the top end of the groove is required to be exposed completely, 5, enabling top layer oxidation film remained on the
hard mask to be etched in a complete mode, and meanwhile enabling bottom oxidation film of the hard
mask to be etched in
transverse mode, 6, conducting homodromous
etching at the bottom of the groove, and meanwhile conducting transverse
etching and vertical
etching for the sharp corner at the top end of the groove so as to reduce the sharp corner at the top end, 7, enabling a sacrificed
oxide layer to grow inside the groove, enabling the sharp corner at the top end of the groove to be completely oxidized and to be disappeared, 8, enabling the sacrificed oxide layer to be etched in the wet method, enabling the
silicon nitride to be etched in the wet manner, and keeping part of the
silicon nitride serving as a
barrier layer for
helix destabilizing
protein (HDP) chemical mechanical lapping. According to the method for eliminating the shaft corner at the top end of the groove, the sharp corner at the top end of the groove can be eliminated, and the fact that trailing HDP can fill the groove without holes is guaranteed.