The invention discloses a method for eliminating a shaft corner at the top end of a groove. The method comprises the steps of 1, enabling oxide-nitride-oxide (ONO) to grow, 2, enabling the ONO to be etched, 3, enabling the groove to be etched, wherein the ONO serves as hard mask for dry etching, 4, enabling middle silicon nitride of the hard mask to be etched by a transverse wet method, wherein the sharp corner at the top end of the groove is required to be exposed completely, 5, enabling top layer oxidation film remained on the hard mask to be etched in a complete mode, and meanwhile enabling bottom oxidation film of the hard mask to be etched in transverse mode, 6, conducting homodromous etching at the bottom of the groove, and meanwhile conducting transverse etching and vertical etching for the sharp corner at the top end of the groove so as to reduce the sharp corner at the top end, 7, enabling a sacrificed oxide layer to grow inside the groove, enabling the sharp corner at the top end of the groove to be completely oxidized and to be disappeared, 8, enabling the sacrificed oxide layer to be etched in the wet method, enabling the silicon nitride to be etched in the wet manner, and keeping part of the silicon nitride serving as a barrier layer for helix destabilizing protein (HDP) chemical mechanical lapping. According to the method for eliminating the shaft corner at the top end of the groove, the sharp corner at the top end of the groove can be eliminated, and the fact that trailing HDP can fill the groove without holes is guaranteed.