A kind of ion beam etching machine and etching method thereof
A technology of ion beam etching machine and ion source, which is applied to discharge tubes, electrical components, circuits, etc., can solve the problems of expensive ion beam etching machine equipment, high cost, and difficult manufacturing, and achieve uniformity and stability Good, reduce equipment cost, improve the effect of precision
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[0036] Embodiment 2: On the basis of Embodiment 1, the multi-axis motion system 2 can also be expanded. This embodiment uses a three-axis motion system. Such as figure 2Said, the three-axis motion system includes the X-axis linear motion module 5, the Y-axis linear motion module 6 and the Z-axis linear motion module 7 arranged according to the space Cartesian coordinate system, the X-axis linear motion module 5, the Y X-axis linear motion module 6 and Z-axis linear motion module 7 are perpendicular to each other. The Y-axis linear motion module 6 is fixedly connected to the X-axis linear motion element 51 of the X-axis linear motion module 5. The Z-axis The linear motion module 7 is fixedly connected to the Y-axis linear motion element 61 of the Y-axis linear motion module 6, and the ion source 3 is fixedly installed on the Z-axis linear motion element 71 of the Z-axis linear motion module 7. Driven by the three-axis motion system, the source 3 can move along the X-axis, Y-a...
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