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Self-powdered sensor for detecting automobile tail gas and preparation method thereof

A technology of automobile exhaust and sensor, applied in the direction of friction generator, material resistance, etc., can solve the problems of low sensitivity, weak output signal, needing an external force source, etc., and achieve the effects of low cost, convenient production and simple structure

Inactive Publication Date: 2016-10-12
UNIV OF ELECTRONIC SCI & TECH OF CHINA
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  • Abstract
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Problems solved by technology

[0007] Based on the above, the present invention provides a self-powered sensor for automobile exhaust detection and its preparation method. The present invention does not need to configure other power sources, can collect the mechanical energy of automobile exhaust and convert it into electrical signal output, and the output electric The signal can be used to measure NO in automobile exhaust 2 ; The present invention can solve the problems of low sensitivity, weak output signal, and need for external force sources in general self-powered gas sensors based on the piezoelectric effect; the present invention can be effectively used in wireless sensor networks for gas detection

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  • Self-powdered sensor for detecting automobile tail gas and preparation method thereof
  • Self-powdered sensor for detecting automobile tail gas and preparation method thereof
  • Self-powdered sensor for detecting automobile tail gas and preparation method thereof

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Embodiment Construction

[0036] Below in conjunction with specific embodiment and accompanying drawing, the present invention is described in detail:

[0037] figure 1 The schematic diagram of the preparation process of the self-powered sensor provided by the present invention, the preparation method of the present invention specifically includes the following steps:

[0038] Step A: preparation of the first part; depositing a copper film with a thickness of 30 to 70 microns on the bottom surface of the cleaned and dried glass substrate 1 (as shown in (a)) as the lower conductive electrode 21 (as shown in (b)), And prepare interdigital electrodes 3 on the top surface of the glass substrate 1 (as shown in figure (c)), the material of the interdigital electrodes 3 is Al or Au, and the specific parameters of the interdigital electrodes 3 are as follows: Width: 25 μm~50 μm , spacing: 25μm~50μm, length: 800μm~4500μm, thickness: 100nm~200nm (such as Figure 4 It is the structure schematic diagram of inter...

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Abstract

The invention discloses a self-powdered sensor for detecting automobile tail gas and a preparation method thereof and belongs to the technical field of self-powdered active type gas sensors. The self-powdered sensor disclosed by the invention comprises a glass substrate, an interdigital electrode, a gas-sensitive thin film layer, an insulating polymer thin film layer, a conductive electrode and an insulating supporting structure. The self-powdered sensor disclosed by the invention can be used for collecting mechanical energy of tail gas exhausted by an automobile as a self-supply power source; and determination of NO2 gas in the automobile tail gas is realized through current or voltage output by a detection circuit. Compared with a traditional nitrogen dioxide sensor, a preparation process is simple, the cost is low, the practicability is high and an extra power supply system is not needed; the self-powdered sensor provided by the invention is novel in structure and natural energy is sufficiently utilized, so that the self-powdered sensor can be widely applied to detection of the automobile tail gas; and the problems of common self-powdered gas sensors based on piezoelectric effect that the sensitivity is low, an output signal is weak, an external force acting source is needed and the like can be solved.

Description

technical field [0001] The invention belongs to the field of self-powered active gas sensors, and in particular relates to a self-powered sensor for automobile exhaust detection and a preparation method thereof. Background technique [0002] With the development of modern industry, power generation, automobile and other industries, the combustion of various fuels and the construction of a large number of chemical plants emit a large amount of toxic gases into the air, which is extremely harmful. Among these problems, automobile exhaust emissions have caused many environmental pollution accidents including photochemical smog. Therefore, rapid and accurate detection and control of low-concentration toxic gas emissions is an urgent problem to be solved. To sum up, research on the detection of NO in automobile exhaust 2 The gas sensor is of great significance. [0003] Gas sensor is an important category of sensors. It is a sensor that converts information such as gas composit...

Claims

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Application Information

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IPC IPC(8): G01N27/12H02N1/04
CPCG01N27/12H02N1/04
Inventor 苏元捷谢法彪唐诗吴寸雪谢光忠杜晓松太惠玲张秋平
Owner UNIV OF ELECTRONIC SCI & TECH OF CHINA
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