Methods of Aluminum Etching

Abstract

The invention provides methods for aluminum etching. By adjusting temperature and pressure conditions in an etching cavity in the dry etching process, aluminum chloride is kept in a gas state, generation of aluminum chloride particles is reduced, the residual quantity of the aluminum chloride in the etching cavity after gas extraction is small, and therefore the content of aluminum-containing compounds in the etching cavity is lowered, and generation of aluminum-containing particles is reduced; or, a gas flushing step is added before the fluorine-chlorine replacement process after the dry etching process, so that the content of aluminum-containing compounds in the etching cavity is lowered, and generation of aluminum-containing particles is reduced; or, an etching cavity cleaning step is added before the dry etching process, so that the content of aluminum-containing compounds in the etching cavity is lowered, and generation of aluminum-containing particles is reduced. By means of the three methods, the content of aluminum-containing particles in the etching cavity can be reduced, the probability that particles fall onto a film to be etched in the dry etching process is reduced, the problems of circuit etching residues and short circuit are solved, and the product yield is increased.

Description

technical field [0001] The invention relates to the field of display technology, in particular to an aluminum etching method. Background technique [0002] With the development of display technology, liquid crystal displays (Liquid Crystal Display, LCD) and other flat display devices are widely used in mobile phones, televisions, personal Various consumer electronic products such as digital assistants, digital cameras, notebook computers, and desktop computers have become the mainstream of display devices. [0003] Most of the liquid crystal display devices currently on the market are backlight liquid crystal displays, which include a liquid crystal display panel and a backlight module. The working principle of the liquid crystal display panel is to place liquid crystal molecules between two parallel glass substrates. There are many vertical and horizontal small wires between the two glass substrates. The direction of the liquid crystal molecules is controlled by electrifyi...

AI Technical Summary

Problems solved by technology

[0006] Usually, after the dry etching process is performed on aluminum, there will be a problem that particles adhere to the inner wall of the etching chamber to form a particle source. When these particles fall on the film layer to be etched in the subsequent etching process , it is likely to cause the problem of line etching residue and short circuit, which will affect the product yield

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