A miniature high-sensitivity optical fiber interferometric pressure sensor and its manufacturing method

Abstract

The invention discloses a micro-type high-sensitivity fiber interference type pressure sensor and a manufacturing method thereof. According to the pressure sensor, a 2D sensitive material film comprising graphene membrane or molybdenum disulfide membrane is used as a pressure-sensitive unit and by use of the fiber interference method, pressure signal detection is achieved. Meanwhile, aiming at the cross influence of temperature on the pressure measurement signals, a Bragg grating is introduced, and by combining methods of design of a sensitive structure of the sensor, encapsulation of an interference cavity, temperature error correction and the like, temperature error compensation of the pressure sensor is achieved. Therefore, the pressure sensor is advantaged by simple manufacturing, small size, measurement of double parameters of pressure / temperature, high sensitivity, electromagnetic interference prevention ability and the like, and can be used for high-sensitivity pressure measurement under micro-size in the field of biomedicine, aerospace, industrial measurement and control and the like.

Description

technical field [0001] The invention relates to the technical field of optical fiber sensing, in particular to a temperature-compensated miniature high-sensitivity optical fiber interference pressure sensor based on a 2D (TwoDimension) sensitive material film and a manufacturing method thereof. Background technique [0002] Optical fiber interferometric sensor is a kind of optical fiber sensor with the longest history, the most mature technology and the most widely used. Due to its small size, anti-electromagnetic interference, distributed, long-distance monitoring and other advantages, it has been widely used in aerospace, biomedicine, industrial automation and other fields. [0003] At present, optical fiber interferometric sensors with diaphragm structure usually have quartz film, organic film, photonic crystal silicon film, silver film and so on. For example, in 2006, Zhang Guiju et al. used quartz membrane to improve the design of fiber optic peroxide low pressure sens...

AI Technical Summary

Problems solved by technology

The sensor is composed of a single-mode optical fiber, a Bragg grating, a two-dimensional material film, and an optical fiber ferrule, etc., which can solve the problems of the diaphragm-type optical fiber interference pressure sensor in the prior art due to the thicker diaphragm and temperature cross-sensitivity. The problem of limited sensitivity and low precision caused by

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