Water-reactive al composite material, water-reactive al alloy spray coating, method for producing the film, and components for a film-forming chamber
A composite material, water reaction technology, applied in the directions of fusion spraying, metal material coating process, sputtering coating, etc., can solve the problems of low Al alloy spray coating strength and long peeling time of Al alloy spray coating, and achieve simple Cost, reuse frequency increase, damage reduction effect
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reference example 1
[0052] Using Al, Bi, Si, and Ti, and further adding Ce, the influence of the addition of Ce on the peeling time (hours) of the sprayed coating in the following compositions was discussed. The added amount is based on Al weight. As a control, Al-In-based Al-3wt%In-0.4wt%Si-0.2wt%Ti obtained by wire flame spraying was used (see Japanese Patent No. 5517371).
[0053] ・Al-1wt%Bi-3wt%Si-1wt%Ti (number of N: 3)
[0054] ・Al-1wt%Bi-3wt%Si-2wt%Ti (number of N: 3)
[0055] ・Al-1wt%Bi-3wt%Si-1wt%Ti-0.2%Ce (number of N: 3)
[0056] ・Al-1wt%Bi-4wt%Si-1wt%Ti (number of N: 3)
[0057] ・Al-1wt%Bi-4wt%Si-2wt%Ti (number of N: 3)
[0058]Al, Bi, Si, Ti, and Ce are blended in the above proportions, and the metals are uniformly melted in Al and then processed into a wire-shaped spraying material. :C 2 h 2 -O 2 Gas, about 3000°C, spraying gun: Sulzer Meteco Co., Ltd., 12E type), in the air atmosphere, spray on the surface of the substrate (A5052) made of aluminum to form an Al alloy spraye...
reference example 2
[0063] Instead of heat treatment (250°C×100) for each Al alloy sprayed film (pseudo-deposited film) composed of each composition obtained as described in Reference Example 1, in this Reference Example, heat treatment at 270°C (atmosphere, 150 hours, furnace cooling) implement the technique of reference example 1. The heat-treated substrate with the sprayed coating was immersed in 300 ml of pure water at 80±1° C., and the peeling time (hour) of each sprayed coating (simulated deposited film) was measured to study solubility. The results obtained are shown in figure 2 . exist figure 2 In , the vertical axis is the peeling time (hr) of the simulated deposited film.
[0064] as by figure 2 As shown, in the case of the control (Al-In-Si-Ti) and Al-Bi-Si-Ti, the pseudo-deposited film could not be peeled off even after 3 hours, but in this Al-Bi-Si-Ti In the case of Ce, the simulated deposited film can be peeled off in less than 0.5 hours. Therefore, it can be seen that the ...
Embodiment 1
[0066] Using Al, Bi, Si, Ti, Ce, and Mg, the influence of the addition of Ce and Mg in the following compositions on the peeling time (hours) of the Al alloy sprayed coating was investigated. The added amount is based on Al weight. As a control, Al-In-based Al-3wt%In-0.4wt%Si-0.2wt%Ti was used (see Japanese Patent No. 5517371).
[0067] ・Al-1wt%Bi-3wt%Si-1wt%Ti-0.2wt%Ce-0.5wt%Mg (number of N: 3)
[0068] Al, Bi, Si, Ti, Ce, and Mg are blended in the above proportions, and a thermal spraying material is used in which each metal is uniformly melted in Al and then processed into a linear shape (a thermal spraying material is also prepared in the same way in the case of a control) , by fusible flame spraying (heat source: C 2 h 2 -O 2 Gas, about 3000° C., spraying gun: 12E type), was sprayed on the surface of the substrate (A5052) made of aluminum in the air atmosphere to form a sprayed film, and then a simulated deposited film was formed in the same manner as above. Heat tre...
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