CMP mixed indictor powder and preparation method thereof
A technology of mixing indicator and powder, which is used in material analysis by observing the influence of chemical indicators, and analysis by chemical reaction of materials, etc., to prevent oxidation, improve accuracy, and reduce errors.
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Embodiment 1
[0024] A preparation method of CMP mixed indicator powder, the composition and steps are as follows:
[0025] Weigh 1g of calcein, 0.1g of methyl thymol blue, 0.2g of phenolphthalein, 50g of dry dehydrated filler (filler is one of sodium chloride, potassium nitrate, anhydrous sodium sulfate), reducing agent Na 2 SO 3 0.1g, mixed with grinding evenly, put into aluminum foil bag, heat sealed and sealed for storage.
Embodiment 2
[0027] A preparation method of CMP mixed indicator powder, the composition and steps are as follows:
[0028] Weigh 100g of calcein, 10g of methyl thymol blue, 20g of phenolphthalein, 5kg of filler, reducing agent Na 2 SO 3 10g, mix and pulverize in a pulverizer, weigh the mixed powder 51.4g / bag, put it in an aluminum foil bag, and heat seal it for preservation.
Embodiment 3
[0030] A preparation method of CMP mixed indicator powder, the composition and steps are as follows:
[0031] Weigh 10g of calcein, 1g of methyl thymol blue, 2g of phenolphthalein, 600g of filler, 2g of reducing agent, grind evenly, weigh 61.5g / bag of mixed powder, put it into an aluminum foil bag, heat seal and seal it for storage.
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