Phase change material-based three-dimensional integrated optical switch

Abstract

The invention discloses a phase change material-based three-dimensional integrated optical switch, which comprises a lower waveguide layer, an upper waveguide layer and a middle mixed waveguide layer, wherein the upper and lower waveguide layers are distributed perpendicularly and crosswise; the middle mixed waveguide layer consists of a dielectric waveguide and a phase change material, and consists of three parts, i.e. an input tapered waveguide, a 90-degree bent waveguide and an output tapered waveguide; an electrode formed from doped silicon is manufactured on the inner side of the 90-degree bent waveguide; an electric pulse is externally applied to form a local hot spot by the middle mixed waveguide layer, thereby inducing the phase change material for phase change. Compared with a conventional 1*2 or 2*2 optical switch unit, the phase change material-based three-dimensional integrated optical switch has the advantages that the phase change material is combined with a conventional waveguide to form a composite waveguide to implement an ultra-compact optical switch with the characteristics of digital regulation, low power consumption, high integration level and the like. In addition, a preparation process is compatible with an existing CMOS (complementary metal oxide semiconductor) process, so that the technology has a large-scale low-cost production potential.

Description

technical field [0001] The invention relates to a three-dimensional integrated optical switch based on a phase change material, belonging to the field of integrated optoelectronics. Background technique [0002] All-optical switching processes optical signals directly in the optical domain without the need for optical-electrical-optical conversion, so it is not limited by the "electronic bottleneck" and has many advantages such as high speed, broadband, transparency, low power consumption, and potential low cost. . Among them, N×N high-speed optical switch chips and modules are the most basic and core components of optical switching, and their importance is equivalent to that of processors in electronic equipment. In order to meet the requirements of high-speed, large-capacity and low-latency switching in the future, optical switching chips and modules with large ports and fast switching are necessary. The experimental system is mainly built with 1×2 or 2×2 optical switchin...

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