Composite Strengthening Treatment Method of Omnidirectional Ion Implantation and Deposition on the Surface of Titanium Alloy Parts
A technology of ion implantation and strengthening treatment, applied in ion implantation plating, metal material coating process, coating, etc., can solve problems such as poor bonding force and bearing capacity, easy peeling from the titanium alloy substrate, and large residual stress , to achieve the effect of strong bearing capacity, excellent compactness and bonding force, and excellent surface properties
Inactive Publication Date: 2010-12-15
SHANGHAI AEROSPACE EQUIP MFG GENERAL FACTORY
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Problems solved by technology
In view of the above-mentioned deficiencies in the prior art, the technical problem to be solved by the present invention is to overcome the defects and deficiencies of large residual stress between the surface anti-wear layer and the titanium alloy part substrate, poor bonding force and bearing capacity, and easy peeling off from the titanium alloy substrate. Provided is a composite strengthening treatment method of omni-directional ion implantation and deposition on the surface of titanium alloy parts
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Abstract
The invention discloses a comprehensive strengthening treatment method of omnidirectional ion implantation and deposition on the surface of a titanium alloy part, which relates to a method for comprehensive ion implantation and deposition strengthening treatment of the surface of a metal material. It solves the problem of large residual stress between the surface anti-wear layer and the titanium alloy part matrix, poor bonding force and bearing capacity, and easy peeling off from the titanium alloy matrix. The synthesis method is carried out according to the following steps: (1) ultrasonic cleaning of titanium alloy parts; (2) argon ion sputtering cleaning of titanium alloy parts; (3) gas ion implantation; (4) deposition of TiN by PIII&D method; (5) deposition of Ti by PIII&D method (CN); (6) TiC deposited by PIII&D method; (7) synthesizing a diamond-like carbon film or MoS2 film to obtain a titanium alloy part with a composite strengthening layer structure on the surface; steps (2) to (7) are carried out in a vacuum chamber. The wear life of the DLC on the composite strengthening layer in the present invention is more than 10 times higher than that of a single-layer DLC with the same thickness, and the friction coefficient is lower than 0.1.
Description
Composite Strengthening Treatment Method of Omnidirectional Ion Implantation and Deposition on the Surface of Titanium Alloy Parts technical field The invention relates to a method for all-round ion implantation and deposition strengthening treatment on the surface of a metal material. Background technique Titanium alloys have high specific strength, good corrosion resistance, and stable mechanical properties at moderate temperatures. They have been widely used in aerospace, aviation, chemical and biomedical fields. However, the wear resistance of titanium alloy is poor, and it is very sensitive to adhesive wear and fretting wear, which seriously affects the safety and reliability of titanium alloy parts and limits its application. It is necessary to adopt a reliable surface strengthening technology to realize the anti-wear strengthening treatment of the surface of titanium alloy parts. The all-round ion implantation and deposition (abroad called plasma immersion ion imp...
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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/48C23C14/02C23C14/16C23C14/54
Inventor 王炜庄纯王浪平徐小明邱颖光
Owner SHANGHAI AEROSPACE EQUIP MFG GENERAL FACTORY
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