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Leak detection and positioning method for vacuum equipment

A technology for vacuum equipment and leak detection, applied in the field of leak detection, can solve the problems of leak location technology, leak high-frequency acoustic emission signals, and the leak detection algorithm of vacuum equipment is not clearly explained, so as to achieve short detection time, high environmental adaptability, and improved safety. Coefficients and Economic Effects

Active Publication Date: 2017-03-08
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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Problems solved by technology

In summary, the above-mentioned technologies are difficult to realize online monitoring of vacuum equipment leakage status
[0004] Literature [Vibration and Shock, 2013, 32(24):164-168], reported a vacuum leak online detection technology using acoustic emission, using parameter characteristic analysis and average spectrum analysis The characteristics of the emission signal have been studied, and the results show that the average time-domain signal frequency band of the vacuum pump operation is below 20kHz, and the gas leakage excites a large number of high-frequency acoustic emission signals. The characteristic value of the leakage signal parameter is closely related to the size of the leakage aperture, but it is not clear. Describes the vacuum equipment leak detection algorithm, and does not propose a leak location technique

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  • Leak detection and positioning method for vacuum equipment

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Effect test

Embodiment 1

[0036] A method for detecting and locating vacuum equipment leakage. A plurality of broadband vibration sensors are preliminarily arranged on the outer surface of the vacuum equipment. circuit and A / D conversion, the vibration sensor obtains a vibration signal reflecting the current state of the vacuum equipment. The vibration signal may include the following components: 1) If there is a leak in the vacuum equipment, the vibration and sound signal caused by the leakage; 2) The vibration signal in the environment where the vacuum equipment is located, such as various pumps; 3) The circuit noise of the detection equipment Signal. In addition, there are structural differences between different vacuum equipment, which makes the leakage acoustic vibration signal itself have differences in amplitude, frequency and other characteristics, and due to the existence of various noises, it is difficult to achieve accurate detection of vacuum equipment leakage by conventional time-frequency...

Embodiment 2

[0045] Such as figure 2 As shown, after confirming that there is a real leak in the vacuum equipment, it is necessary to locate the leak point. Due to the complex structure of vacuum equipment and the existence of branch structures, it is difficult to accurately locate the leak point by using the traditional time-delay method. Therefore, according to the structural characteristics of the vacuum equipment, combined with the actual model of vibration propagation and the energy dissipation characteristics of different positions of the vacuum equipment, the leakage can be realized. The process of point positioning is as follows:

[0046] First, establish the actual model of vibration propagation on the vacuum equipment, the specific method is as follows:

[0047] (1) According to the geometric parameters of the vacuum equipment, such as size, in combination with the classical structural vibration transmission theory, the vibration transmission theoretical model of the vacuum equ...

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Abstract

The invention, which belongs to the technical field of leakage detection, relates to a leak detection and positioning method for vacuum equipment. A vibration signal of a current state of vacuum equipment is collected and framing processing is carried out on the collected vibration signal; each frame of data are decomposed into a plurality of signal components at different frequency ranges; the signal components are processed to extract a suspected leak sound signal component and a suspected leak sound frequency range; the suspected leak sound signal component is processed to detect whether leak exists; if so, a leak point is localized by combining a practical vibration propagation model and energy consumption features of different locations of the vacuum equipment. According to the method provided by the invention, the vibration signal is used as a processed object, so that leak of vacuum equipment can be discovered timely and accurately and the leak point location can be localized rapidly. On-line monitoring of the leak state of the vacuum equipment is realized; and the operation safety factor and economy of the vacuum equipment are improved.

Description

technical field [0001] The invention belongs to the technical field of leak detection, and in particular relates to a vacuum equipment leak detection and positioning method. Background technique [0002] In recent years, the vacuum equipment industry has made great progress, and has achieved objective results in terms of output value, variety, specification and comprehensive technical level. The key to the advantages and disadvantages of vacuum equipment is the vacuum leakage rate, and the resulting problem is how to carry out leak detection of vacuum equipment. [0003] At present, vacuum leak detection methods mainly include helium mass spectrometry leak detection method, bubble leak detection method, halogen leak detection method, high frequency spark leak detection method, ion pump leak detection method, vacuum gauge leak detection method and sonic leak detection method, etc. Among them, helium mass spectrometry leak detection uses helium as the leak gas for air tightne...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M3/24
CPCG01M3/24
Inventor 张鑫胡东霞代万俊张晓璐袁强王德恩杨英薛峤
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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