Tunable waveguide grating based on silicon waveguide-graphene

Abstract

The invention discloses a tunable waveguide grating based on silicon waveguide-graphene, and belongs to the technical field of optoelectronic devices. The tunable waveguide grating aims at relieving the problems that an existing grating is narrow in tunable wavelength range and low in response speed, and the grating structure is inconvenient to integrate. The waveguide grating of the same structure has different selectivities on light waves under different electric field conditions, and the reflecting wavelength of the grafting is changed. The tunable waveguide grating comprises a substrate, a ridge-shaped silicon waveguide is arranged on the substrate and comprises a ridge area lower half waveguide body and a ridge area upper half waveguide body, the ridge area lower half waveguide body is covered with a wrapping layer, the ridge area lower half waveguide body is sequentially provided with a first isolating dielectric layer, a first graphene layer, a third isolating dielectric layer, a second graphene layer and a fifth isolating dielectric layer from bottom to top, and a ridge area upper half rectangular waveguide body is arranged on the fifth isolating dielectric layer. The first graphene layer and the second graphene layer are both of an interdigital electrode structure, and interdigitals of the interdigital electrode structures are periodically arranged at equal intervals.

Description

technical field [0001] The invention belongs to the technical field of optoelectronic devices, in particular to a tunable waveguide grating based on silicon waveguide-graphene. Background technique [0002] Grating refers to a diffraction system with periodic changes in spatial structure or distribution of optical parameters (such as refractive index), which can reflect, refract, interfere and diffract light, and play an important role in the regulation of optical signals. In optical fiber communication, Gratings have important applications in semiconductor lasers, waveguide input and output couplers, beam splitters, polarization splitters, filters, optical add and drop filters, and sensing. [0003] The traditional grating is to form grooves on the surface of the grating by photolithography. After the grating is successfully fabricated, its structure and period remain unchanged. Since the resonant wavelength of the grating is only related to the period and effective refract...

AI Technical Summary

Problems solved by technology

[0006] In order to solve the problems of narrow tunable wavelength range of the grating, slow response speed and inconvenient integration of the grating structure in the prior art, the present invention proposes a tunable waveguide grating based on silicon waveguide-graphene

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