Low g value capacitive MEMS accelerometer and modal localization measurement circuit thereof
An accelerometer, capacitive technology, applied in the direction of velocity/acceleration/impact measurement, acceleration measurement, measurement device, etc., can solve the problems of limited capacitance change, insufficient, difficult to meet the microgravity measurement, etc. Effect of Capacitance Value
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[0045] The technical scheme adopted in the present invention is: a MEMS capacitive acceleration sensor. The acceleration sensor chip includes a spring mass system and a pair of bases 6 made of glass, the spring mass system is packaged between the pair of bases and suspended.
[0046] The spring mass system is integrally processed, including a mass block 1 and a spring 2, the mass block 1 is processed by a silicon substrate 10, the thickness of the silicon substrate is 30 μm, and the silicon substrate 10 is divided into three parts by a pair of springs 2 , are respectively: the fixed end 3 of the mass block at both ends and the mass block in the middle, and the spring 2 is located between one of the fixed ends of the mass block and the mass block, forming the fixed end of the mass block / spring / mass block / spring / mass block fixed end structure.
[0047] The spring 2 is a serpentine spring, and the mass block 1 is suspended in the air and supported by the serpentine spring 2, so ...
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