Low g value capacitive MEMS accelerometer and modal localization measurement circuit thereof

An accelerometer, capacitive technology, applied in the direction of velocity/acceleration/impact measurement, acceleration measurement, measurement device, etc., can solve the problems of limited capacitance change, insufficient, difficult to meet the microgravity measurement, etc. Effect of Capacitance Value

Active Publication Date: 2017-03-22
XI AN JIAOTONG UNIV
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Problems solved by technology

Due to the limitation of its MEMS capacitive accelerometer structure, the output capacitance change is limited, which is obviously insufficient for the gravity field detection

Method used

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  • Low g value capacitive MEMS accelerometer and modal localization measurement circuit thereof
  • Low g value capacitive MEMS accelerometer and modal localization measurement circuit thereof
  • Low g value capacitive MEMS accelerometer and modal localization measurement circuit thereof

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[0045] The technical scheme adopted by the present invention is: a MEMS capacitive acceleration sensor. The acceleration sensor chip includes a spring mass system and a pair of bases 6 made of glass. The spring mass system is packaged between the pair of bases and is suspended.

[0046] The spring mass system is integrally processed and includes a mass block 1 and a spring 2. The mass block 1 is processed from a silicon substrate 10 with a thickness of 30 μm, and the silicon substrate 10 is divided into three parts by a pair of springs 2 , Respectively: the fixed end 3 of the mass at both ends and the mass in the middle, the spring 2 is located between one of the fixed ends of the mass and the mass, forming a fixed end of the mass / spring / mass / spring / fixed by the mass The structure of the end.

[0047] The spring 2 is a serpentine spring, and the mass 1 is suspended and supported by the serpentine spring 2, and can move freely in three directions. The spring 2 is used to provide r...

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Abstract

The invention discloses a low g value capacitive MEMS accelerometer and a modal localization measurement circuit thereof. A capacitive MEMS acceleration sensor comprises a silicon-based mass block, a spring, capacitor plates, X, Y, and Z direction limit blocks, and capacitor plate electrodes. Four differential capacitors are formed by the capacitor plates and mass blocks. Through a first lead wire hole, a second lead wire hole and the capacitor plate electrodes, a differential capacitance signal is introduced into a modal localization circuit. A capacitance measurement system comprises an ASIC modal localization circuit, a reference voltage source, and a multi-phase clock source. The output current and capacitance of the ASIC modal localization circuit are approximately in a linear relationship. When a frequency analysis and data acquisition/retention module carries out sampling to obtain a modal frequency of the modal localization circuit, a response current signal is inputted into a DSP to carry out cache calculation via low pass filtering. A novel differential capacitance MEMS acceleration sensor and a modal localization measurement circuit which detects weak capacitive change are designed, and the high precision weak acceleration change is realized.

Description

[0001] 【Technical field】 [0002] The invention relates to the technical field of acceleration sensors, in particular to an ultra-low g-value MEMS capacitive acceleration sensor and a capacitance measurement method. [0003] 【Background technique】 [0004] Acceleration sensing technology is widely used in earthquake monitoring, coal mining and aerospace fields. Traditional moving coil acceleration sensors have gradually been unable to meet the needs of production and life due to their large size, high energy consumption, and insufficient accuracy. Micro-electromechanical system (MEMS) acceleration sensors The sensor has the characteristics of small size, high precision, high integration and good stability, and has the tendency to replace the traditional acceleration sensor and become the mainstream. [0005] According to the principle, MEMS acceleration sensors can include capacitive, piezoresistive, resonant, and tunnel current types, among which the capacitive acceleration se...

Claims

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Application Information

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IPC IPC(8): G01P15/125
CPCG01P15/125
Inventor 韦学勇张宏才兰海翁寅生
Owner XI AN JIAOTONG UNIV
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