Tunable filter and tunable filter array

Abstract

The invention discloses a tunable filter. The tunable filter comprises a semiconductor substrate, a first reflection plane, a bottom electrode, a support element, a metal deck, and a second reflection plane. The first reflection plane is arranged on the semiconductor substrate; the bottom electrode comprises a first electrode and a second electrode which are electrically insulated, and the bottom electrode is formed on the first reflection plane; the support element is arranged on the second electrode, and is used to support the metal deck and electrically connects the metal deck to the second electrode; the metal deck is supported by the support element and is arranged opposite to the bottom electrode, the metal deck is a maze shaped cantilever frame structure that is rotationally symmetric concerning the central point; the second reflection plane is arranged in the metal deck and is exposed at the side facing the first reflection plane. The invention also discloses a tunable filter array, the array comprises a substrate with a readout circuit; the array is provided with a plurality of tunable filters on the substrate, wherein the tunable filter is a tunable filter as described previously.

Description

technical field [0001] The invention belongs to the technical field of micro-electromechanical systems, relates to the technical field of optical filtering, and in particular relates to a tunable filter and a filter array. Background technique [0002] The traditional camera obtains the geometric image information of the target. With the development of optical technology, people put forward the concept of spectral imaging. Imagers and spectrometers are two different types of optical instruments. The spectral imaging technology combines imaging technology and spectral technology to obtain the target's spectral information while obtaining the two-dimensional spatial information of the target. Imaging spectroscopy technology is a comprehensive technology integrating detector technology, precision optical machinery, weak signal detection, computer technology, and information image processing technology. An imaging spectrometer is an optical sensor that acquires three-dimensiona...

AI Technical Summary

Problems solved by technology

Traditional spectroscopic techniques use dispersive (prism, grating) spectroscopic, interferometric (Fourier transform) spectroscopic, and these systems form spectrometers that weigh hundreds of pounds or have complex computational requirements

As the technical specifications of imaging spectrometers are getting higher and higher, mainly in terms of spatial resolution, spectral resolution, and weak signal detection capabilities, imaging spectrometers with traditional (dispersion, interference) spectroscopic techniques are gradually unable to meet the requirements. And due to the development of infrared focal plane array technology, traditional spectroscopic elements are not suitable for the development of focal plane technology. Therefore, the development of filter spectroscopic devices compatible with focal plane technology is an important development direction in the industry.

Images