Five-axis three-dimensional ultrasonic polishing machine tool for optical curved surface machining and use method of five-axis three-dimensional ultrasonic polishing machine tool

Abstract

The invention discloses a five-axis three-dimensional ultrasonic polishing machine tool for optical curved surface machining. The five-axis three-dimensional ultrasonic polishing machine tool comprises a machine tool, an ultrasonic atomization device for applying polishing liquid and a workpiece on-line detection device. An X-direction travel mechanism, a Z-direction travel mechanism and a Y-direction travel mechanism are arranged on the machine tool; a spindle ultrasonic vibration polishing device is arranged on the Z-direction travel mechanism; a Y-direction ultrasonic vibration device is arranged on the Y-direction travel mechanism; a C-direction rotating work table is arranged on the Y-direction ultrasonic vibration device; the machine tool can enable the axis line direction of a polishing head parallel to the normal line of a polishing point of a workpiece through five-axis linkage; when the polishing head rotates, the ultrasonic wave of the Y-direction ultrasonic vibration device and the ultrasonic wave of the ultrasonic vibration polishing device which swings around the Z direction are vertically coupled in a plane; when the amplitude A1 of the Y-direction ultrasonic vibration device is greater than the amplitude A2 of the ultrasonic vibration polishing device, the polishing head and the workpiece can form an elliptic machining track where a long axis is in the Y-direction and a short axis is in the normal line position of the polishing point of the workpiece, so that the contact area between the polishing head and the workpiece is increased, and the curved surface removal rate and the polishing machining efficiency can be greatly improved.

Description

technical field [0001] The invention relates to a polishing machine, in particular to a five-axis three-dimensional ultrasonic polishing machine tool for optical curved surface processing and a use method thereof. Background technique [0002] With the development of industrial technology, hard and brittle materials have shown broad application prospects in the fields of aerospace, automobiles, molds, optics, and semiconductors. Optical glass is often used to make reconnaissance satellite camera lenses, stealth radar search mirrors, high-speed aircraft windows, large mirrors for astronomical telescopes, and optical lenses and prisms in laser emitting devices. Conventional machining of optical elements of hard and brittle materials is very difficult, and is usually obtained through ultra-precision grinding, polishing and ultra-precision grinding, but this method takes a long time and costs a lot. In order to solve this processing problem, an ultrasonic polishing processing m...

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