T-junction cantilever beam online type microwave phase detector
A technology of phase detector and cantilever beam, which is applied to the phase angle between voltage and current, instruments, measuring devices, etc., can solve the problems of inability to realize microwave phase detection, complex structure, etc., and achieve the effect of easy measurement and easy integration
Inactive Publication Date: 2017-05-31
SOUTHEAST UNIV
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Problems solved by technology
The existing microwave phase detection technology is based on the diode, multiplier structure and vector operation principle, which have the advantages of low loss, high sensitivity and wide frequency band, but its biggest disadvantage is that the structure is relatively complex, and online microwave phase detection cannot be realized detection
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[0014] The T-junction cantilever beam online microwave phase detector of the present invention is fabricated on a high-resistance silicon substrate 1, and a layer of SiO is prepared on the high-resistance silicon substrate. 2 Layer 24, on SiO 2 Layer 24 is provided with a coplanar waveguide transmission line, two cantilever beam structures 1 and 2 symmetrical to the signal line of the coplanar waveguide transmission line, a T-junction, and a direct heating microwave power sensor 1 and a direct heating microwave power sensor 2. As the signal transmission line of the phase detector of the present invention, the coplanar waveguide transmission line is used for the transmission of the microwave signal to be tested. The coplanar waveguide transmission line is composed of the signal line 2 and the ground line 3 of the signal line of the coplanar waveguide transmission line. The cantilever beam structure 1 and the cantilever beam structure 2 are suspended above the insulating medium...
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The invention relates to a T-junction cantilever beam online type microwave phase detector. The detector is prepared on a high-resistivity silicon substrate and composed of a coplanar waveguide transmission line, two cantilever beam structures symmetrical relative to a signal wire of the coplanar waveguide transmission line, a T-junction and two direct-heating type microwave power sensors. The coplanar waveguide transmission line comprises the signal wire and a ground wire thereof; each cantilever beam structure comprises a cantilever beam and an anchor region, and is suspended over an insulating dielectric layer on the signal wire; the T-junction which is a three-port device is composed of the signal wire and the ground wire of the coplanar waveguide transmission line, and an air bridge; each direct-heating type microwave power sensor comprises a terminal resistor, a semiconductor thermocouple arm, a direct-current output block and an isolated direct-current capacitor. The detector is simple in structure, small in circuit size and capable of realizing online detection of microwave phase.
Description
technical field [0001] The invention provides a T-junction cantilever beam on-line microwave phase detector, which belongs to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] Microwave signal phase measurement plays a very important role in microwave measurement. Microwave signal phase detection system is widely used in phase modulator, phase shift keying, microwave positioning, antenna phase pattern test and near-field diagnosis. The existing microwave phase detection technology is based on the diode, multiplier structure and vector operation principle, which have the advantages of low loss, high sensitivity and wide frequency band, but its biggest disadvantage is that the structure is relatively complex, and online microwave phase detection cannot be realized detection. With the development of microelectronics technology, modern personal communication systems and radar systems have higher and higher requirements for microwave ...
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IPC IPC(8): G01R25/00G01R21/02G01R15/00
CPCG01R15/00G01R21/02G01R25/00Y02P70/50
Inventor 廖小平严德洋
Owner SOUTHEAST UNIV