Dewar structure with functions of detection and safety protection

A Dewar structure and safety protection technology, which is applied to the outer wall of the container structure, the method of container discharge, and the details of ship construction, can solve the problems of increased pressure of the Dewar container, potential safety hazards, and icing at the opening, and achieve Reduced cost of use, improved safety, and simple operation

Inactive Publication Date: 2017-06-09
无锡盈芯半导体科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this standard Dewar structure still has many defects, such as poor thermal insulation performance, low-temperature liquid medium is easy to volatilize, and there will be a safety hazard of freezing at the exposure in a high-humidity environment, which cannot be released, and it is not convenient to use with a cold trap.
[0004] When the cold trap is placed in the Dewar flask, the upper opening cannot be completely sealed, and the opening is sti

Method used

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  • Dewar structure with functions of detection and safety protection
  • Dewar structure with functions of detection and safety protection
  • Dewar structure with functions of detection and safety protection

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] like figure 1 , figure 2 As shown, the Dewar structure with detection and safety protection of the present invention mainly includes a Dewar tank body composed of a Dewar outer cylinder 101 and a Dewar inner cylinder 102, a pressure sensor 109 and a liquid level gauge 110. A state detection system, a pressure relief system composed of a burst disc 111 and a pressure relief valve 112, and a cold trap adapter interface 113 reserved on the Dewar tank body, and the Dewar tank body is connected to the cold trap T through the cold trap adapter interface 113 . The present invention detects the state of the Dewar tank body in real time through the state detection system, and the excess pressure is discharged in time through the pressure relief system to ensure the normal and safe use of the cold trap T. specifically:

[0026] The Dewar tank body includes a Dewar outer cylinder 101 and a Dewar inner cylinder 102, and a heat insulating layer 106 is arranged in the interlayer ...

Embodiment 2

[0035] like image 3 As shown, the Dewar structure with detection and safety protection of the present invention mainly includes a Dewar tank body composed of a Dewar outer cylinder 201 and a Dewar inner cylinder 202, a pressure sensor 209, a liquid level gauge 210 and a pressure sensor 209. A state detection system composed of an indicator gauge 214, a pressure relief system composed of a burst disc 211 and a pressure relief valve 212, and a cold trap adapter interface 213 reserved on the Dewar tank body, and the Dewar tank body passes through the cold trap adapter interface 213 Connect with cold trap T. specifically:

[0036] The Dewar tank body includes a Dewar outer cylinder 201 and a Dewar inner cylinder 202, and an insulating layer 206 is arranged in the interlayer between the Dewar outer cylinder 201 and the Dewar inner cylinder 202, and the Dewar outer cylinder 201 The interlayer between the Dewar inner cylinder 202 is evacuated through the vacuum outlet 203 to the h...

Embodiment 3

[0042] Such as Figure 4 As shown, the Dewar structure with detection and safety protection of the present invention mainly includes a Dewar tank body composed of a Dewar outer cylinder 301 and a Dewar inner cylinder 302, a pressure sensor 309 and a liquid level gauge 310. The state detection system, the pressure relief system composed of the burst disc 311, the mechanical pressure relief valve 314 and the pressure relief valve 312, and the cold trap adapter interface 213 reserved on the Dewar tank body, the Dewar tank body is adapted through the cold trap The interface 213 is connected with the cold trap T. specifically:

[0043] The Dewar tank body includes a Dewar outer cylinder 301 and a Dewar inner cylinder 302, and an insulating layer 306 is provided in the interlayer between the Dewar outer cylinder 301 and the Dewar inner cylinder 302, and the Dewar outer cylinder 301 The interlayer between the Dewar inner cylinder 302 is vacuumed through the vacuum port 303 to the h...

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PUM

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Abstract

The invention relates to a Dewar structure with the functions of detection and safety protection. The Dewar structure is characterized by comprising a Dewar tank body, wherein an inner cavity which is isolated from the outside is formed in the Dewar tank body; an injection port and an exhaust port are formed in the Dewar tank body, a low-temperature liquid medium is injected to the inner cavity from the injection port, and a gas in the inner cavity is discharged from the exhaust port; a cold trap adapter interface used for connecting a cold trap is arranged on the Dewar tank body; and a state detection system used for detecting the pressure of the inner cavity and the liquid-level height of the low-temperature liquid medium and a pressure relief system used for discharging excessive pressure of the inner cavity are arranged on the Dewar tank body. The Dewar structure with the functions of detection and safety protection, disclosed by the invention, is used for performing exhaust gas treatment in material deposition, growth and processing equipment, can reduce the volatilization of the low-temperature liquid medium and avoids safety problems caused by freezing.

Description

technical field [0001] The invention relates to a Dewar structure, in particular to a Dewar structure with detection and safety protection. Background technique [0002] The material deposition, growth and processing equipment belongs to the vacuum system. The vapor exhaust gas from the material deposition, growth and processing process will corrode and damage the subsequent pipeline and vacuum pump, and the return of oil vapor from the oil-sealed vacuum pump to the vacuum reaction chamber will also affect the product. . Therefore, it is necessary to use cold traps and other devices to condense the reaction tail gas and oil vapor to ensure the normality of the process and equipment. The lower the cooling temperature of the cold trap, the better the trapping effect on reaction tail gas and oil vapor, so it is generally used in conjunction with Dewar, and the low-temperature refrigeration medium is usually liquid gas such as liquid nitrogen. [0003] The conventional Dewar s...

Claims

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Application Information

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IPC IPC(8): F17C1/12F17C13/02F17C13/00
CPCF17C1/12F17C13/00F17C13/002F17C13/021F17C13/025F17C2203/03F17C2250/0626
Inventor 谢鹏飞蒋健伟孙正乾
Owner 无锡盈芯半导体科技有限公司
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