Manufacturing method of metal hollow microsphere

Abstract

The invention provides a manufacturing method of a metal hollow microsphere. The manufacturing method is characterized in that a diamond tool is used to machine inner semispherical faces and an interface on the end face of a metal bar, each inner semispherical face is polished into a mirror face through the inner semispherical face grinding technology, using material diffusion to connect the two inner semispherical faces under a vacuum, high-temperature and high-pressure environment, using the diamond turning technology to machine a first outer semispherical face, using a clamp special for the outer semispherical face to clamp and machine a second outer semispherical face, using the four-axis sphere grinding technology to grind the whole outer spherical face, using CT to detect the wall thickness and the wall thickness evenness of the sphere, performing correction until the wall thickness and the wall thickness evenness satisfy requirements, and polishing into mirror faces to obtain the metal hollow microsphere. The manufacturing method has the advantages that the outer diameter phi of the metal hollow microsphere manufactured by the method is 1-10mm, and the wall thickness of the metal hollow microsphere is 100-200 micrometers; the machining of the inner semispherical faces of the metal hollow microsphere is achieved; automatic centering of the connection of the two inner semispherical faces is achieved; connection of two semispherical faces is achieved, and component consistency of the metal hollow microsphere is guaranteed.

Description

technical field [0001] The invention belongs to the field of ultra-precision micromachining, and in particular relates to a method for manufacturing metal hollow microspheres. Background technique [0002] Precision spheres are important components in roundness meters, gyroscopes, bearings, and precision measuring instruments. In the electrostatic gyroscope, the hollow spherical rotor is the core component of the electrostatic gyroscope. Its quality and precision are important factors that directly affect the overall accuracy of the electrostatic gyroscope (positioning accuracy and navigation accuracy). In the state, it can guarantee a small sphericity error and mass imbalance, the sphericity error is below 0.05μm, and the surface roughness is below 25nm; in measuring equipment such as roundness meters, precision spheres are often used as the benchmark for precision measurement; In inertial confinement fusion research, hollow microspheres (target pellets) are the core compo...

AI Technical Summary

Problems solved by technology

The preparation of inertial confinement fusion metal target pellets (metal hollow microspheres) generally adopts coating methods such as magnetron sputtering on the surface of the mold core ball made of organic materials, and then degrades the mold core through high temperature to obtain hollow metal microspheres. It is difficult to ensure the density and compactness of the material, which will affect the performance of metal hollow microspheres

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