A high-power high-current ion source four-electrode support seat assembly
An ion source and four-electrode technology, which is applied in electrical components, ion beam tubes, circuits, etc., can solve the problems of high dynamic pumping speed and high cost of the pumping system, and increase the area of the pumping port and reduce the processing accuracy requirements. , the effect of reducing the probability of discharge
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[0027] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
[0028] Taking the 80kV, 45A, 5s ion source electrode support assembly as an example, the specific implementation is given. The ion source electrode support assembly such as image 3As shown, the overall dimensions are 780mm in length, 506mm in width, and 318mm in height. It mainly consists of the first flange 1, the first insulating cavity 2, the second flange 3, the second insulating cavity 4, the third flange 5, the third insulating cavity 6, the fourth flange 7, the second electrode bracket 8, The third electrode support 9, the fourth electrode support 10 and other components are composed.
[0029] The first flange 1 is used to support the first electrode grid 11 and provide access for the water cooling circuit of the first electrode grid 11 . It cooperates with the first insulating chamber 2, the first electrode grid 11 and the...
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