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Controllable-curvature curved surface detector formed by focal plane detectors

A focal plane detector and detector technology, applied in the field of curved surface detectors, can solve the problems of edge off-axis distortion, complex application, coma aberration, etc., to reduce manufacturing costs, ensure focus uniformity, save optical prisms and optical processing The effect of the component

Inactive Publication Date: 2017-07-28
YANTAI RAYTRON TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Existing solutions are generally planar focal plane array imaging. When entering large-scale high-definition (2K, 4K) imaging, researchers adjust the optical path through complex systems such as lenses and other optical components, so that the light is focused on the focal plane of the detector ( FPA), in order to get better imaging effect, the application is more complicated
[0003] A single focal plane detector is suitable for large field of view imaging, and even a large array of planar detectors composed of multiple focal plane detectors still has problems such as edge off-axis distortion, astigmatism, and coma.

Method used

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  • Controllable-curvature curved surface detector formed by focal plane detectors
  • Controllable-curvature curved surface detector formed by focal plane detectors
  • Controllable-curvature curved surface detector formed by focal plane detectors

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Experimental program
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Effect test

Embodiment 1

[0046] The detector body is as image 3 As shown, it includes an insulating medium layer 1-3, a metal reflective layer, a first support layer 1-4, and a metal electrode layer. The semiconductor base 1-1 is provided with a metal reflective layer and an insulating medium layer 1-3. The metal reflective layer includes several metal blocks 1-2;

[0047] The metal block is provided with a first support layer 1-4, the first support layer 1-4 is provided with a first through hole, and the first through hole terminates in the metal block 1-2, the A metal electrode layer is provided on the first support layer 1-4 and in the first through hole, and the metal electrode layer includes a metal electrode 1-5 disposed on the first support layer 1-4 and a metal electrode disposed on the first support layer 1-4. Metal connections 1-7 in a through hole;

[0048] The metal electrode layer is provided with a first protection layer 1-6, the first protection layer 1-6 is provided with a second su...

Embodiment 2

[0051] The detector body as Figure 4 As shown, it includes a metal reflective layer, an insulating medium layer 1-3, a support layer 1-12 and a titanium oxide film. The metal reflective layer and the insulating medium layer 1-3 are arranged on the semiconductor base 1-1. The metal The reflective layer includes several metal blocks 1-2;

[0052] The insulating medium layer 1-3 is provided with a supporting layer 1-12, and the supporting layer 1-12 is provided with an anchor point hole and a through hole, and the through hole is terminated at the metal block 1-2, and the The anchor hole and the through hole are filled with connecting metal 1-13, and the supporting layer 1-12 and the connecting metal 1-13 are provided with a titanium oxide film, and the titanium oxide film includes The semiconductor titanium oxide film 1-15 and the conductive titanium oxide film 1-16 in the bridge leg area, the semiconductor titanium oxide film is provided with a first protective layer 1-6, the...

Embodiment 3

[0054] The detector body is as Figure 5 As shown, it includes a metal reflective layer, an insulating medium layer 1-3 and a supporting layer 1-12. The metal reflective layer and the insulating medium layer 1-3 are arranged on the semiconductor base 1-1. The metal reflective layer includes several 1-2 metal blocks;

[0055] The insulating medium layer 1-3 is provided with a supporting layer 1-12, and the supporting layer 1-12 is provided with an anchor point hole and a through hole, and the through hole is terminated at the metal block 1-2, and the The anchor holes and the through holes are filled with connection metal 1-13, the bridge surface area of ​​the support layer 1-12 is provided with a semiconductor titanium oxide film 1-15, the connection metal 1-13 and the support layer The bridge leg region of 1-12 is provided with a titanium film 1-14 in the same layer as the oxide layer film, and a first protective layer 1-6 is provided on the titanium film 1-14, and the semico...

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Abstract

The invention relates to a controllable-curvature curved surface detector formed by a plurality of focal plane detectors. The curved surface detector comprises the plurality of focal plane detectors which are arranged in a curved surface shape. Through adjusting a height of each semiconductor pedestal, the curved surface detector with different radiuses of curvature can be formed, modularization manufacturing can be realized and an optical system adapting to various parameters is realized too. Through adjusting the semiconductor pedestal and a number of detector bodies, an array size of the curved surface detector can be adjusted so that demands of fields of view with different sizes can be satisfied. Optical prisms and optical processing components required by a traditional plane and a focal plane can be saved, wherein the optical prisms and optical processing components are used to guarantee image quality, and manufacturing cost is reduced.

Description

technical field [0001] The invention belongs to the field of micro-electromechanical system process manufacturing in semiconductor technology, and in particular relates to a curvature-controllable curved surface detector composed of a plurality of focal plane detectors. Background technique [0002] Existing solutions are generally planar focal plane array imaging. When entering large-scale high-definition (2K, 4K) imaging, researchers adjust the optical path through complex systems such as lenses and other optical components, so that the light is focused on the focal plane of the detector ( FPA), in order to get better imaging effect, the application is more complicated. [0003] A single focal plane detector is suitable for large field of view imaging, and even a large array of planar detectors composed of multiple focal plane detectors still has problems such as edge off-axis distortion, astigmatism, and coma. Contents of the invention [0004] Aiming at the deficienci...

Claims

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Application Information

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IPC IPC(8): G01J5/02G01J5/10
CPCG01J5/0275G01J5/10
Inventor 杨鑫王鹏王宏臣陈文礼甘先锋董珊孙丰沛
Owner YANTAI RAYTRON TECH