Preparation method of graphene gas sensor

Abstract

The invention provides a graphene gas sensor and a preparation method thereof. The preparation method of the graphene gas sensor at least comprises the steps of providing a substrate; forming an oxidation layer on the upper surface of the substrate; forming a metal graphical structure covering part of oxidation layer on the upper surface of the oxidation layer; removing the other part of oxidation layer which is not covered by the metal graphical structure so as to form an opening exposing part of substrate; forming graphene layers on the upper surface and the side wall of the metal graphical structure and the side wall and the bottom part of the opening, wherein the graphene layers are contacted with the part of substrate exposed by the opening, so that a schottky barrier is realized. According to the graphene gas sensor and the preparation method thereof provided by the invention, by combining an existing graphic technique process, the problems of pollution and damage of a graphene thin film during a craft process are ingeniously solved. According to the graphene gas sensor provided by the invention, not only are the sensitivity and the stability greatly improved, but also the cost is reduced, and the batch production and the preparation efficiency of such devices are realized favorably.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a method for preparing a graphene gas sensor. Background technique [0002] In 1964, the first gas sensor was developed by Wickens and Hatman using the redox reaction of gas on the electrode. In 1982, Persaud of the University of Warwick in the United Kingdom proposed the structure of using a gas sensor to simulate the animal's olfactory system. Since then, gas sensors have developed rapidly and have been widely used in national defense security, environmental detection, gas leakage detection, industrial production, and medical and health fields. application. [0003] At present, there are various types of gas sensors commonly used, mainly including semiconductor sensors (resistive and non-resistive), insulator sensors (contact combustion type and resistive type), electrochemical type (potential electrolytic type, galvanic battery type), and Infrared absorption type, quartz osc...

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Problems solved by technology

[0008] In view of the above-mentioned shortcoming of the prior art, the purpose of the present invention is to provide a kind of preparation method of graphene gas sensor, be used to solve the complex procedure in the prior art can cause serious pollution to graphene, affect the performance of graphene gas sensor. Sensitivity, performance stability and continuity are prone to waste of resources and cannot be prepared in batches

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