Method for preparing multifunctional protective nano-coating through cyclic, periodical and alternate discharging

Abstract

The invention provides a method for preparing a multifunctional protective nano-coating through cyclic, periodical and alternate discharging, and belongs to the technical field of plasma. According to the method, a reaction chamber is vacuumized, and inert gas is introduced into the reaction chamber; a base material is made to move in the reaction chamber; monomer steam is introduced into the reaction chamber for chemical vapor deposition, and the deposition process includes a pretreatment stage and a film plating stage; in the pretreatment stage, plasma discharges continuously at the high power; in the film plating stage, the plasma discharges periodically and alternately; and the pretreatment stage and the film plating stage repeated cyclically at least once. In the technological process of film plating, more active sites are introduced onto the surface of the base material cyclically, effective film plating is improved, the film structure is more compact, the nano-coating of the multi-layer composite structure is obtained, and multiple protection is provided for a product; and on the microscopic level, the coating structure is more compact, and on the macroscopic level, the coating has excellent hydrophobicity, adhesive force, acid and alkali resistance, mechanical performance, and moisture and heat resistance.

Description

technical field

[0001] The invention belongs to the technical field of plasma chemical vapor deposition, and in particular relates to a method for preparing a multifunctional nano protective coating. Background technique

[0002] Corrosive environments are the most common cause of damage to electronic devices. Corrosion of solid materials in electronic devices, reduction of conductor / semiconductor insulation, and failure phenomena such as short circuit, open circuit or poor contact due to environmental corrosion. At present, in the products of high-tech industries such as national defense and aerospace, the proportion of electronic components is increasing, and the requirements for moisture-proof, mildew-proof and corrosion resistance of electronic products are becoming more and more stringent. In the field of communication, with the continuous advancement of technology, the continuous increase of communication frequency, the heat dissipation of communication equipment, and...

Examples

Embodiment 1

[0068] A method for preparing a multifunctional nano-protective coating with alternate discharge cycles, comprising the following steps:

[0069] (1) The base material is placed in the reaction chamber of the nano-coating preparation equipment, the reaction chamber is closed and the reaction chamber is continuously evacuated, the vacuum degree in the reaction chamber is evacuated to 10 millitorr, and the inert gas Ar is passed into, Turn on the motion mechanism to make the substrate move in the reaction chamber;

[0070] In step (1), the base material is a solid material, and the solid material is a block aluminum material and a PCB board, and any interface of the base material surface can be exposed to cold and heat after the cold and heat cycle impact coating is prepared. in a loop test environment.

[0071] The volume of reaction chamber is 50L in the step (1), and the temperature of reaction chamber is controlled at 30 ℃, and the flow that feeds inert gas is 5 sccm.

[0...

Embodiment 2

[0090] A method for preparing a multifunctional nano-protective coating with alternate discharge cycles, comprising the following steps:

[0091] (1) Place the substrate in the reaction chamber of the nano-coating preparation equipment, close the reaction chamber and continuously evacuate the reaction chamber, pump the vacuum in the reaction chamber to 60 millitorr, feed inert gas He, and start Motion mechanism to make the base material move;

[0092] In step (1), the base material is a solid material, and the solid material is a block aluminum material, and any interface of the base material surface can be exposed to a damp heat test environment after the wet heat-resistant alternating coating is prepared.

[0093] The volume of reaction chamber is 250L in the step (1), and the temperature of reaction chamber is controlled at 40 ℃, and the flow that feeds inert gas is 15 sccm.

[0094] In step (1), the base material performs planetary motion with a revolution speed of 6 revo...

Embodiment 3

[0112] A method for preparing a multifunctional nano-protective coating with alternate discharge cycles, comprising the following steps:

[0113] (1) Place the substrate in the reaction chamber of the nano-coating preparation equipment, close the reaction chamber and continuously evacuate the reaction chamber, pump the vacuum in the reaction chamber to 130 millitorr, feed inert gas Ar, and start Motion mechanism to make the base material move;

[0114] In step (1), the base material is a solid material, and the solid material is a block polytetrafluoroethylene plate and an electrical component, and any interface of the block polytetrafluoroethylene plate can be exposed after the anti-mold coating is prepared on the surface Used in the GJB150.10A-2009 mold test environment, any interface of the electrical components can be exposed to the environment described in the international industrial waterproof grade standard IPX7 after the waterproof and electric breakdown resistant coa...

technical field

[0001] The invention belongs to the technical field of plasma chemical vapor deposition, and in particular relates to a method for preparing a multifunctional nano protective coating. Background technique

[0002] Corrosive environments are the most common cause of damage to electronic devices. Corrosion of solid materials in electronic devices, reduction of conductor / semiconductor insulation, and failure phenomena such as short circuit, open circuit or poor contact due to environmental corrosion. At present, in the products of high-tech industries such as national defense and aerospace, the proportion of electronic components is increasing, and the requirements for moisture-proof, mildew-proof and corrosion resistance of electronic products are becoming more and more stringent. In the field of communication, with the continuous advancement of technology, the continuous increase of communication frequency, the heat dissipation of communication equipment, and...

Examples

Embodiment 1

[0068] A method for preparing a multifunctional nano-protective coating with alternate discharge cycles, comprising the following steps:

[0069] (1) The base material is placed in the reaction chamber of the nano-coating preparation equipment, the reaction chamber is closed and the reaction chamber is continuously evacuated, the vacuum degree in the reaction chamber is evacuated to 10 millitorr, and the inert gas Ar is passed into, Turn on the motion mechanism to make the substrate move in the reaction chamber;

[0070] In step (1), the base material is a solid material, and the solid material is a block aluminum material and a PCB board, and any interface of the base material surface can be exposed to cold and heat after the cold and heat cycle impact coating is prepared. in a loop test environment.

[0071] The volume of reaction chamber is 50L in the step (1), and the temperature of reaction chamber is controlled at 30 ℃, and the flow that feeds inert gas is 5 sccm.

[0...

Embodiment 2

[0090] A method for preparing a multifunctional nano-protective coating with alternate discharge cycles, comprising the following steps:

[0091] (1) Place the substrate in the reaction chamber of the nano-coating preparation equipment, close the reaction chamber and continuously evacuate the reaction chamber, pump the vacuum in the reaction chamber to 60 millitorr, feed inert gas He, and start Motion mechanism to make the base material move;

[0092] In step (1), the base material is a solid material, and the solid material is a block aluminum material, and any interface of the base material surface can be exposed to a damp heat test environment after the wet heat-resistant alternating coating is prepared.

[0093] The volume of reaction chamber is 250L in the step (1), and the temperature of reaction chamber is controlled at 40 ℃, and the flow that feeds inert gas is 15 sccm.

[0094] In step (1), the base material performs planetary motion with a revolution speed of 6 revo...

Embodiment 3

[0112] A method for preparing a multifunctional nano-protective coating with alternate discharge cycles, comprising the following steps:

[0113] (1) Place the substrate in the reaction chamber of the nano-coating preparation equipment, close the reaction chamber and continuously evacuate the reaction chamber, pump the vacuum in the reaction chamber to 130 millitorr, feed inert gas Ar, and start Motion mechanism to make the base material move;

[0114] In step (1), the base material is a solid material, and the solid material is a block polytetrafluoroethylene plate and an electrical component, and any interface of the block polytetrafluoroethylene plate can be exposed after the anti-mold coating is prepared on the surface Used in the GJB150.10A-2009 mold test environment, any interface of the electrical components can be exposed to the environment described in the international industrial waterproof grade standard IPX7 after the waterproof and electric breakdown resistant coa...

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