Centrifugal triaxial MEMS inertial measurement unit device for nano-optical grating

Abstract

The invention relates to a centrifugal triaxial MEMS inertial measurement unit device for nano-optical grating. The device mainly structurally comprises an upper base plate, a movable optical grating layer, a fixed optical grating layer, a lower base plate, photoelectric detectors, a detection beam, a linking block, a mass block, movable optical gratings, a boss, laser sources and leads, wherein the photoelectric detectors and the leads are arranged in the upper base plate, the movable optical grating layer is provided with a support framework, the mass block, the detection beam and the linking block, the movable optical gratings are arranged in the center of the mass block, the fixed optical grating layer is provided with fixed optical gratings, and the laser sources and the leads are arranged in the lower base plate. The device does not need to be driven and has the advantages of high measuring range, simple structure and small cross coupling error and transverse error.

Description

technical field [0001] The invention relates to a nano-grating centrifugal three-axis MEMS inertial set device, which belongs to the related field of micro-inertial navigation technology. Background technique [0002] The commonly used methods of inertial measurement components are strapdown type and platform type. The sensitivity improvement of the strapdown type depends on the sensitivity improvement of each discrete device, and the assembly and design errors cannot satisfy the orthogonal assembly of the micro-gyroscope and micro-accelerometer on the three axes, making the conditioning The circuit is complex and difficult to debug, and the platform type is not conducive to miniaturization and integration due to its large size. [0003] At present, the mainstream driving method of the micro-mechanical gyroscope in the micro-mechanical inertial group device is to drive the mass block to resonate through the capacitor plate. Due to the error in the processing, the gyroscope c...

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Problems solved by technology

[0002] The commonly used methods of inertial measurement components are strapdown type and platform type. The sensitivity improvement of strapdown type depends on the sensitivity improvement of each discrete device, and the assembly and design errors cannot satisfy the orthogonal assembly of micro-gyroscopes and micro-accelerometers in three axes, making the conditioning The complexity of the circuit is high, and it is difficult to debug. The platform type is not conducive to miniaturization and integration due to its large size.

[0003] At present, the mainstream driving method of the micro-mechanical gyroscope in the micro-mechanical inertial group device is to drive the mass block to resonate through the capacitor plate. Due to the error in the processing, the gyroscope cannot achieve the symmetry of the original design, and the mechanical coupling caused by the structural error will cause the output to be relatively large. Large noise, and the error caused by processing is usually compensated by placing a detection module on the meter head, and the output of the secondary circuit is compensated accordingly, which brings huge difficulties to the design of the secondary processing circuit and high cost

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