A charged particle beam diagnostic device and diagnostic measurement method
A technology of charged particle beams and charged particles, which is applied in the fields of precision opto-mechanical, aerospace and aerospace, can solve the problem of not being able to give the absolute current intensity and measurement of charged particle beams; steric energy analysis, energy spectrum, uniformity, etc. Collimation measurement and other issues, to achieve the effect of high integration, simple and compact equipment, and low beam intensity
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[0033] The present invention will be described in detail below with reference to the drawings and embodiments.
[0034] The purpose of the present invention is to provide a charged particle beam diagnostic device and related diagnostic measurement method for space environment simulation test. The commonly used space low-energy charged particle simulation source has an energy range of 0.1~80keV and a flow range of 10~1010cm. -2 s -1 , The beam spot size is ≥50mm, and the beam divergence angle is ≤±2°. It is difficult for the traditional Faraday tube 1 and MCP detector to meet such a large dynamic range of energy and flow and beam cross-section of charged particle beam diagnosis.
[0035] The MCP microchannel plate 3 is a large-area electron multiplying device. It uses the characteristics of secondary electron emission to multiply the secondary electrons generated by high-speed collisions, and finally achieve an increase of more than a thousand times. It is an ideal diagnostic device...
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