Charged particle beam diagnosis device and diagnosis measurement method
A charged particle beam, charged particle technology, applied in aerospace, precision opto-mechanical fields, can solve the problem of not being able to give the absolute current intensity of the charged particle beam, unable to measure and measure the energy spectrum, uniformity, and collimation of the charged particle beam; problems such as steric hindrance energy analysis, to achieve the effect of high integration, simple and compact equipment, and low beam intensity
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[0033] The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0034] The object of the present invention is to provide a charged particle beam diagnostic device and related diagnostic measurement method for space environment simulation test. Commonly used spatial low-energy charged particle simulation sources have an energy range of 0.1-80keV and a flow range of 10-1010cm -2 the s -1 , the beam spot size is ≥50mm, and the beam divergence angle is ≤±2°. It is difficult for traditional Faraday cup 1 and MCP detectors to meet such a large dynamic range of energy and flux and charged particle beam diagnosis of beam cross section.
[0035] MCP microchannel plate 3 is a large-area electron multiplication device. It uses the characteristics of secondary electron emission to multiply the secondary electrons generated by high-speed impact, and finally achieve a thousand-fold increase in electron flow. It is an ideal diagnos...
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