Laser deposition system for batch synthesis of composite materials

Abstract

The invention provides a laser deposition system for batch synthesis of composite materials. The laser deposition system for batch synthesis of the composite materials comprises a laser source, a stepper motor module, a first reflecting mirror, a second reflecting mirror, a vacuum chamber, at least two first fixed platforms for fixing different source material targets, and a substrate for depositing the composite materials; the first fixed platforms and the substrate are both arranged in the vacuum chamber; the at least two first fixed platforms are opposite to preset areas of the substrate; the vacuum chamber is provided with a light transmitting part; the laser source and a light emitting direction of the first reflecting mirror form a preset included angle; the stepper motor module is connected with the second reflecting mirror for driving the second reflecting mirror to rotate to a preset angle; and the first reflecting mirror is used for reflecting laser, emitted by the laser source, to the second reflecting mirror in the corresponding position.

Description

technical field [0001] The invention relates to the field of composite material preparation, in particular to a laser deposition system for batch synthesis of composite materials. [0002] Background technique [0003] At present, there is a very large focus in the field of materials science on the research of composite materials, such as solar materials, the performance of these composite materials is mainly determined by their components. In order to study and optimize these materials, the usual method is to synthesize materials one by one. This exploration process is very time consuming. Therefore, it is very necessary to find an efficient and systematic method to explore and study composite materials. In this way, the research efficiency of composite materials, especially three-component or four-component composite materials that have not been fully developed and utilized, will be greatly improved. [0004] In 1995, Xiang Xiaodong and others invented a combined me...

AI Technical Summary

Problems solved by technology

It brings a series of problems, such as phase separation, mask misalignment and process complexity, etc.

These problems have not been solved, and gradually become the fundamental problems of this method

[0008] However, pulsed laser deposition has a very prominent disadvantage, which is the inhomogeneity of the growth rate, that is, the thickness of the film will not be uniform everywhere on the substrate.

However, in this invention, the non-uniform growth rate of pulsed laser deposition is used to synthesize the material, so that the composition of each point on the substrate is different.

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