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Method for preparing uniform and controllable microlens structure by utilizing femtosecond laser

A femtosecond laser and femtosecond laser technology, applied in the field of lens arrays, can solve the problems that it is difficult to obtain a lens array with a size of 100 microns in a single-layer material, and the size controllable range is small, so as to improve the diameter and height controllable range. , The effect of reducing the surface binding force and not easy to break

Active Publication Date: 2018-02-27
无锡超通智能制造技术研究院有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The expansion structure prepared by traditional laser is generally about tens of microns, and the size can be adjusted in a small range; it is difficult to obtain a lens array with a size of hundreds of microns by processing a single layer of material with laser

Method used

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  • Method for preparing uniform and controllable microlens structure by utilizing femtosecond laser
  • Method for preparing uniform and controllable microlens structure by utilizing femtosecond laser
  • Method for preparing uniform and controllable microlens structure by utilizing femtosecond laser

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Embodiment 1

[0019] A method for preparing a uniform and controllable microlens structure using a femtosecond laser, comprising the following steps:

[0020] 1) PMMA particles are dissolved in toluene, and a solution with a PMMA mass fraction of 15%-25% is prepared, coated on a 2cm*2cm black acrylic plate 2, and cured to obtain a double-layer processing sample, such as figure 1 As shown, the upper transparent PMMA layer 1 has a small energy absorption rate, and is used as an expansion layer material; the lower black acrylic plate 2 has a large energy absorption rate, and is used as an absorption layer; the transparent PMMA layer 1 has strong light transmittance, and the energy Transfer to the black acrylic plate 2; the energy absorbed by the black acrylic plate 2 causes the material to decompose, and the energy absorbed by the transparent PMMA layer 1 produces a softening effect. The softening effect of the transparent PMMA layer 1 and the decomposition of the black acrylic plate 2 are real...

Embodiment 2

[0026] The laser power in step 3) of Example 1 is set to 60mW, the number of pulses is 2000, and the array pitch is 500 μm; refer to Figure 4 , this embodiment can obtain a microlens array with a diameter and a height of 482 and 280 μm, respectively.

Embodiment 3

[0028] The laser power in Step 3) of Example 1 is set to 40.8mW, the number of pulses is 2500, and the array pitch is 450 μm; a microlens array with diameter and height between Example 1 and Example 2 can be obtained.

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Abstract

The invention relates to a method for preparing a uniform and controllable microlens structure by utilizing femtosecond laser. The method comprises the following steps of firstly, dissolving PMMA (Poly Methyl Methacrylatemethacrylic Acid) particles in methylbenzene, coating on a black acrylic plate, and curing so as to obtain a double-layer processing sample wafer; then constructing a light path,wherein the light path comprises a femtosecond laser, output light of the femtosecond laser is reflected by a first reflecting mirror, so that the light path is rotated for 90 degrees, reflected lightpasses through a damping piece, a diaphragm, a half-wave plate, a beam splitter prism, a shutter, a second reflecting mirror and a focusing objective lens in sequence and then is perpendicularly irradiated at the processing station of a movable objective table, and the femtosecond laser, the shutter and the movable objective table are connected with a computer; and then adjusting parameters of output laser of the femtosecond laser by using the computer, fixing the double-layer sample wafer to the processing station of the movable objective table, and controlling the movable objective table tomove by using the computer through the irradiation of the femtosecond laser. According to the method, the difference of the light absorption rate of the transparent PMMA layer and the black acrylic plate is used, so that an expansion area is separated from an absorption area, a microlens array structure is difficult to break, and the microlens array diameter and height controllable range is enlarged.

Description

technical field [0001] The invention belongs to the technical field of lens arrays, in particular to a method for preparing a uniform and controllable microlens structure by using a femtosecond laser. Background technique [0002] Lens arrays are widely used in optical devices, organic light-emitting diodes, bionic compound eyes and other fields. At present, there are many methods to prepare microlenses. Among them, methods such as photolithography, hot melting, and chemical etching have complicated procedures and poor controllability. These shortcomings are the major reasons that limit their development. Ultrafast laser processing, due to its ultra-high spatial resolution and "cold processing" characteristics, is widely used in the field of fine processing technology. [0003] The expansion structure prepared by traditional laser is generally about tens of microns, and the size can be adjusted in a small range; it is difficult to obtain a lens array with a size of hundreds...

Claims

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Application Information

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IPC IPC(8): B23K26/60B23K26/0622G02B3/00
CPCB23K26/0624B23K26/60G02B3/0025
Inventor 王文君李江梅雪松孙学峰潘爱飞崔健磊
Owner 无锡超通智能制造技术研究院有限公司