High-purity gas cylinder inner wall MOCVD nickel plating device and method

A gas cylinder and high-purity technology, which is applied in gaseous chemical plating, metal material coating process, coating and other directions, can solve the problems of obstacles, low efficiency, and large difference in thickness of nickel plating in the nickel plating process, and achieves a solution to the problem. Nickel plating uniformity problem, high efficiency, good uniformity effect

Pending Publication Date: 2018-02-27

JINCHUAN GROUP LIMITED

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AI-Extracted Technical Summary

Problems solved by technology

However, this method has shortcomings such as large differences in the thickness of the nickel coating due to the uneven current density passing through the surface of the object to ...

Abstract

The invention discloses a MOCVD nickel plating device and method for the inner wall of a high-purity gas cylinder. Inlet pipe, air outlet pipe, exhaust pipe, decomposer connecting pipe, pressure gauge, nickel carbonyl inlet control valve, CO/N2 inlet control valve, exhaust control valve and decomposition treatment control valve, which can control the entry into high-purity gas cylinders The gas flow, concentration and temperature in the high-purity gas cylinder can be maintained within a reasonable range, and nickel can be deposited on the inner wall of the high-purity gas cylinder by using a mixed gas of nickel carbonyl and CO to deposit nickel under certain pressure and temperature conditions. The dense, continuous, uniform and smooth nickel plating layer can well meet the nickel plating requirements of high-purity gas cylinders, and can better solve the problem of nickel plating uniformity that the existing technology is not suitable for irregular containers, not only It is suitable for nickel plating on the inner wall of high-purity gas cylinders, and it can also be widely used for nickel plating of large and complicated objects.

Application Domain

Chemical vapor deposition coating

Technology Topic

DecomposerNickel Carbonyl +10

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Examples

Experimental program(1)

Example Embodiment

[0023] The present invention will be further described below with reference to the drawings and specific embodiments.

[0024] Such as figure 1 As shown, a MOCVD nickel plating device for the inner wall of a high-purity gas cylinder includes a heater 2 arranged outside the high-purity gas cylinder 1. The heater 2 is centrally symmetrical to the high-purity gas cylinder 1, and the heater 2 is an infrared or resistance heater At least three temperature measuring thermocouples 16 are uniformly arranged on the outer side wall of the high purity gas cylinder 1, and the temperature measurement range is 0-200℃. The inlet of the high purity gas cylinder 1 is connected with a nickel carbonyl gas inlet pipe 9 and CO/N 2 Intake connecting pipe 8, carbonyl nickel intake pipe 9 is provided with carbonyl nickel intake control valve 10 and carbonyl nickel intake flow meter 11, CO/N 2 CO/N is provided on the intake connecting pipe 8 2 Intake control valve 6 and CO/N 2 Intake flow meter 7, CO/N 2 Intake connecting pipe 8 is connected with CO intake pipe 17 and N 2 Intake pipe 18, CO intake pipe 17 is provided with CO intake hand valve 5, N 2 The intake pipe 18 is provided with N 2 The inlet valve 4, the outlet of the high purity gas cylinder 1 is connected with an outlet pipe 12, the diameter of the outlet pipe 12 is nickel carbonyl gas inlet pipe 9, CO/N 2 The inlet connecting pipe 8 is three times the pipe diameter, the outlet pipe 12 is equipped with a pressure gauge 15, and the pressure control range is 0-30Kpa, the outlet pipe 12 is connected with a waste discharge pipe 19 and a resolver connecting pipe 20, and the waste discharge pipe 19 A waste discharge control valve 13 is provided, a decomposition treatment control valve 14 is provided on the resolver connecting pipe 20, and a resolver 3 is connected to the resolver connecting pipe 20.

[0025] When using the MOCVD nickel plating device on the inner wall of the high-purity gas cylinder for nickel plating, the following steps are included:

[0026] A. Close the exhaust control valve 13 on the exhaust pipe 19 and the decomposition treatment control valve 14 on the resolver connecting pipe 20, and open N 2 N on intake pipe 18 2 Intake hand valve 4 and CO/N 2 CO/N on intake connecting pipe 8 2 Intake control valve 6, set N 2 Enter the high-purity gas cylinder 1 for leak detection.

[0027] B. After leak detection and holding pressure 0.1MPa without leakage, close N 2 Intake manual valve 4, open the CO intake manual valve 5 on the CO intake pipe 17, pass CO gas into the high purity gas cylinder 1 for CO replacement, open the exhaust control valve 13, and pass the replaced gas through the exhaust The tube 19 is discharged.

[0028] C. After the replacement is completed, the heater 2 and the decomposer 3 heat up. After the heater 2 heats up to the specified temperature, open the nickel carbonyl intake control valve 10 on the nickel carbonyl intake pipe 9 and pass the nickel carbonyl intake pipe 9 and the CO intake pipe 17 Pass the nickel carbonyl gas and CO gas into the high purity gas cylinder 1, adjust the nickel carbonyl gas inlet control valve 10 and the CO gas inlet hand valve 5, so that the nickel carbonyl gas inlet flow rate is 660-2000g/min, and the CO gas inlet flow rate is 250-750g/min, and control the internal pressure of the high-purity gas cylinder 1 below 10Kpa, and the wall temperature of the high-purity gas cylinder 1 is 120-150℃. After the reaction time meets the requirements, deposit a deposit on the inner wall of the high-purity gas cylinder 1. The layer is dense, continuous, uniform and smooth nickel plating.

[0029] D. Stop the intake of nickel carbonyl gas and CO gas, open the decomposition treatment control valve 14, and the reacted gas in the high purity gas cylinder 1 and the incompletely reacted nickel carbonyl gas enter the decomposer 3 for processing.

[0030] E. Close the decomposition treatment control valve 14, open the exhaust control valve 13 and N 2 The gas inlet valve 4 is filled with nitrogen to replace the nickel-plated high-purity gas cylinder 1, and the replaced gas is discharged from the exhaust pipe 19.

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