High-purity gas cylinder inner wall MOCVD nickel plating device and method
A gas cylinder and high-purity technology, which is applied in gaseous chemical plating, metal material coating process, coating and other directions, can solve the problems of obstacles, low efficiency, and large difference in thickness of nickel plating in the nickel plating process, and achieves a solution to the problem. Nickel plating uniformity problem, high efficiency, good uniformity effect
Pending Publication Date: 2018-02-27
JINCHUAN GROUP LIMITED
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Abstract
The invention discloses a MOCVD nickel plating device and method for the inner wall of a high-purity gas cylinder. Inlet pipe, air outlet pipe, exhaust pipe, decomposer connecting pipe, pressure gauge, nickel carbonyl inlet control valve, CO/N2 inlet control valve, exhaust control valve and decomposition treatment control valve, which can control the entry into high-purity gas cylinders The gas flow, concentration and temperature in the high-purity gas cylinder can be maintained within a reasonable range, and nickel can be deposited on the inner wall of the high-purity gas cylinder by using a mixed gas of nickel carbonyl and CO to deposit nickel under certain pressure and temperature conditions. The dense, continuous, uniform and smooth nickel plating layer can well meet the nickel plating requirements of high-purity gas cylinders, and can better solve the problem of nickel plating uniformity that the existing technology is not suitable for irregular containers, not only It is suitable for nickel plating on the inner wall of high-purity gas cylinders, and it can also be widely used for nickel plating of large and complicated objects.
Application Domain
Chemical vapor deposition coating
Technology Topic
DecomposerNickel Carbonyl +10
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