High-purity gas cylinder inner wall MOCVD nickel plating device and method
A gas cylinder and high-purity technology, which is applied in gaseous chemical plating, metal material coating process, coating and other directions, can solve the problems of obstacles, low efficiency, and large difference in thickness of nickel plating in the nickel plating process, and achieves a solution to the problem. Nickel plating uniformity problem, high efficiency, good uniformity effect
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[0023] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0024] Such as figure 1 As shown, a high-purity gas cylinder inner wall MOCVD nickel plating device includes a heater 2 arranged outside the high-purity gas cylinder 1, the heater 2 is symmetrical to the center of the high-purity gas cylinder 1 and the heater 2 is an infrared or resistance heater The outer side wall of the high-purity gas cylinder 1 is evenly provided with at least three temperature-measuring thermocouples 16, and the temperature measurement range is 0-200°C. The inlet of the high-purity gas cylinder 1 is connected with a nickel carbonyl inlet pipe 9 and a CO / N 2 Intake connection pipe 8, carbonyl nickel intake pipe 9 is provided with carbonyl nickel intake control valve 10 and carbonyl nickel intake flowmeter 11, CO / N 2 CO / N is provided on the intake connecting pipe 8 2 Intake control valve 6 and CO / N 2 Intake flow meter 7,...
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