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Closed-loop operating method and operating platform for nano members under SEM (scanning electron microscope)

A technology of nano-manipulation and operation platform, which is applied in the direction of nano-structure manipulation, nano-structure manufacturing, nano-technology, etc., can solve the problems of difficulty in making force sensors, easy damage, high production cost, etc., shorten the research cycle, improve perception ability, improve The effect of control accuracy and reliability

Inactive Publication Date: 2018-05-08
HARBIN UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For nanoscale operations, micro force sensors are a better solution than position sensors; however, force sensors for micro-nano operations, especially nanoscale operations, are very difficult, costly, and easily damaged

Method used

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  • Closed-loop operating method and operating platform for nano members under SEM (scanning electron microscope)
  • Closed-loop operating method and operating platform for nano members under SEM (scanning electron microscope)
  • Closed-loop operating method and operating platform for nano members under SEM (scanning electron microscope)

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] The closed-loop control method and operating platform for nano-components under SEM use molecular dynamics to simulate the operation process of nano-components, establish the best matching relationship between operating angle, operating point and single-step displacement, and theoretically solve the problem of nano-component movement, The efficiency and success rate of positioning and picking.

[0023] Analyze and find the physical characteristics and experimental parameters of the components, and establish the model of the nano-components in Lammps; through the setting of the mechanical parameters, analyze the elasticity, plasticity, and fracture characteristics of the nano-components, and analyze the nano-component models from different operating angles and operating points Carry out the operation, observe and analyze its influence on the performance of the component, and provide a theoretical basis for the research on the influence of the adhesion force in the process...

Embodiment 2

[0026] The described extraction method based on the three-dimensional feature information of the two-dimensional SEM image utilizes the ambiguity evaluation function of the region of interest of the two-dimensional SEM image to obtain the target depth information, and establishes the fuzzy PID control model of the end effector based on Simulink for simulation, and finally The obtained information is used to realize the three-dimensional closed-loop nano-operation control based on fuzzy PID; the only two-dimensional image is transformed into a three-dimensional visualized nano-operation environment, which improves the perception ability of the operator.

[0027] Accurately obtaining the location information of operating tools (probes) is critical for both the direct operation of the slave sample and the reconstruction of the virtual environment. Since there is no additional measuring device or sensor installed in the sample chamber of the slave SEM, the real-time two-dimensional...

Embodiment 3

[0031] In the modeling method of the described virtual nano operating environment, the model of the nano component is established in Lammps; according to the extracted three-dimensional feature information, with the help of VR technology, with VS 2008 as the main development environment, 3dsMax and OpenGL are used for joint modeling, Quickly create dynamic skeletal models of probes and components.

[0032] Based on the contact mechanism model of nano-component operation, the contact collision and non-contact collision detection algorithm of virtual nano-operation is studied, which is divided into three parts: probe and operation substrate, nanowire and operation substrate, and probe and nanowire. Do your research, then integrate.

[0033] Further study the force sense rendering algorithm, and use the Chia3d force sense rendering engine to render under the premise that the force sense rendering algorithm is verified by Matlab.

[0034] For the construction of the operation pla...

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Abstract

A closed-loop operating method and operating platform for nano members under SEM (scanning electron microscope) are provided. Studies on the closed-loop operating method and operating platform for nano members under SEM may provide theoretical basis and practical methods for the stable operation of nanoscale members and are more of important theoretical and practical significance to promoting thefurther development of related studies in the fields of China, such as NEMS (nano electro mechanical systems), bioengineering, photoelectric engineering and nano science. Work proceeded in projects includes basic studies, manly focused on providing related theories, methods and control strategies for the real-time efficient three-dimensional visual operation of nanoscale members in terms of mechanism and methodology, the development and functionalization of nano operating techniques can be substantially promoted, the method and platform are of important theoretical significance and practical value, and a platform is provided for system industrialization toward the fields, such as bioengineering, photoelectric engineering and information storage.

Description

technical field [0001] The invention belongs to micro-nano operation, and in particular relates to a closed-loop control method of a nano-component under an SEM and a design scheme of an operation platform. Background technique [0002] Nano-manipulation is the application of external fields on the nanoscale to enable micro-nano devices to move, position, pick up / release, reshape, etc., as well as assemble and package operations according to human wishes, so as to achieve effective control of the entire microcosm. One of the important contents of nanomanufacturing science and technology research is a hot research field that has received wide attention in the field of international robotics and nanotechnology. Nano-operating systems are playing an increasingly important role in the exploration and manufacturing of micro / nano-scale functional devices. Using nano-operation technology to manufacture micro / nano devices with good reliability, strong adaptability, high technology a...

Claims

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Application Information

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IPC IPC(8): B82B3/00B82Y40/00
CPCB82B3/0061B82Y40/00
Inventor 李东洁王倩倩李潜
Owner HARBIN UNIV OF SCI & TECH
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