30 results about "Nanoscale Science" patented technology

The technical field of the invention is material chemistry, nanoscience, catalytic chemistry and medicine, and particularly relates to the preparation of magnetic nanocrystals with high solubility and high crystallinity in neutral water by a "one-pot" method and a preparation method thereof. Its main technical feature is the use of solvothermal decomposition of organometallic precursors or metal-inorganic salt compounds with high boiling point, catalytic function, reduction function and polymerizable function, while forming magnetic nanocrystals, realizing water-soluble polymers on the surface of nanocrystals The in-situ modification of the soluble magnetic nanocrystals with high solubility is obtained. Its main feature is that it can be dissolved in neutral water (pH=6~8), and the formed solution has long-term stability; its main inorganic components include iron, Cobalt, nickel, manganese and their oxides; their shape is spherical or petal-shaped; their shape and size are controlled by controlling the concentration and heating time of the precursor of the magnetic nanocrystal-organic precursor or inorganic salt.

The invention discloses a green synthetic method suitable for preparing a controllable superfine metal oxide / carbon nano tube composite material, relating to the field of nano science and catalytic composite materials. An active phase comprises multifunctional oxides of TiO2, ZrO2 and Fe2O3. The synthetic method comprises the following steps of: pretreating corresponding metal salts of TiOCl2, ZrOCl2 and Fe(NO3)3 in a DMF(Dimethyl Formamide) solution to form a precursor; adding phenol as a surfactant in the precursor; adding a multi-wall carbon nano tube treated with a proper amount of acid; carrying out slow hydrolytic polymerization and depositing under the condition of heating to form a TiO2 / CNT (Carbon Nano Tube), ZrO2 / CNT and Fe2O3 / CNT / composite material. The method has general applicability to realizing that multifunctional nano metal oxides which are convenient to obtain through hydrolysis are compounded with carbon tubes with hydrophobe surfaces; and the obtained nano composite material is possibly applied to various catalytic fields.

The invention discloses a 3 nanometer-20 micrometer aerosol particle size distribution measuring apparatus, and belongs to the technical field of environment aerosol measurement. The measuring apparatus integrates an aerodynamic particulate matter size spectrometer, a nano-particulate matter differential electromobility analyzer, a nano-particulate matter condensation nucleus particle counter, a sub-micron particulate matter differential electromobility analyzer and a sub-micron particulate matter condensation nucleus particle counter, and is characterized in that a voltage / flow control box is used to provide hierarchical voltages and sheath gas to the two particulate matter analyzers; a data acquisition card is used to synchronously acquire impulse signals of the particulate matter size spectrometer and the two particle counters; and a measurement control system is used to control the voltage output and sheath gas flow of the voltage / flow control box, process and analyze the impulse signals input to the data acquisition card, and output a two-dimensional diagram showing a 3 nanometer-20 micrometer particle size distribution spectrum and a three-dimensional diagram containing a time series. The measuring apparatus disclosed by the invention has the beneficial effects that the measurement is precise, the apparatus operation is simple, and the apparatus can provide technical support for atmosphere combined pollution and nanometer scientific research.

The invention relates to high-performance gamma-Fe2O3 magnetofluid and a preparation method of the high-performance gamma-Fe2O3 magnetofluid, and belongs to the technical field of nanoscale science and technology and material preparation. The preparation method is characterized in that magnetic nanometer particles are prepared through a chemical coprecipitation method, after ferrous salt solutions and ferric salt solutions are evenly mixed, superfluous alkaline solutions are added till complete reaction is finished, then moderate surfactants are added and surface modification treatment is conducted, and finally the magnetic nanometer particles are obtained after sediment is conducted; after the magnetic Fe3O4 nanometer particles are cleaned and dried, the gamma-Fe2O3 magnetic particles are obtained after the cleaned and dried gamma-Fe2O3 magnetic particles are subjected to oxidation at a certain temperature in a certain time period; quantitative surfactants and carrier liquids are added to a gamma-Fe2O3 magnetic particle solution , dispersion is conducted, and the high-performance gamma-Fe2O3 magnetofluid is obtained. The high-performance gamma-Fe2O3 magnetofluid prepared through the preparation method is simple in process and high in specific magnetization, and industrial batch production can be achieved conveniently.

The invention discloses a space micro-gripper based on compliant mechanisms. The space micro-gripper comprises plane gripping branch chains with a symmetric structure and microprobes. Five pairs of symmetric circular flexible hinges are adopted in the gripping branch chains to achieve two stages of amplification of input displacement of the space micro-gripper, wherein three pairs of flexible hinges are symmetrically distributed on the two sides to achieve the first stage of amplification of input displacement, and the other two pairs of flexible hinges are used for achieving the second stage of amplification. A clamping groove structure is adopted for perpendicularly and symmetrically assembling the two gripping branch chains in a cross form, the two gripping branch chains are connected together in the manner of nesting an upper groove and a lower groove so that the drive positions of the two gripping branch chains can be the same, and the two gripping branch chains are driven by one driver at the same time. Four gripping arms of the two gripping branch chains are each provided with one corresponding microprobe, the microprobes are sleeved with the gripping branch chains in a threaded connection manner so that the elongation of the microprobes can be adjusted, and adjustability of the size of a gripping opening is achieved. The four microprobes are symmetrically arranged to form the square space gripping opening, and when gripped objects are in four-point contact, objects in irregular shapes can be gripped. The designed space micro-gripper can be used for the fields of bioengineering, micro electro mechanical systems, nanoscale science and technology, optical engineering and the like.

The invention relates to a preparation method for high-stability quantum dot composite, and specifically provides a preparation method for the high-stability quantum dot composite, which belongs to the nano scientific field. The preparation method comprises the following steps: dissolving a quantum dot with an organic solvent to obtain a quantum dot solution; and uniformly mixing the quantum dot solution, n-butylamine, ethyl silicate, 3-sulfydryl propyl triethoxy silicane, methane and water in proportion. According to the preparation method disclosed by the invention, short-chain organic amine is used to replace strong alkali catalysts of long-chain organic amine, ammonia water and the like in the prior art, so that damages to the quantum dot in the preparation process are reduced, and the stability and the fluorescence efficiency of the quantum dot composite are improved.

The invention relates to an optical tool regulator for an excimer laser micromachining system, which belongs to the technical field of micro-nanoscale science and is used for MEMS machining. In the optical tool regulator, a sliding seat (1) is arranged on an optical guide rail; a regulating seat (2), a supporting plate (3), a mirror bracket (4) and a tight positioner (5) are sequentially arranged on the sliding seat (1); the mirror bracket (4) is provided with an optical tool hole (22) capable of accommodating a circular optical element with heavy caliber; and a square optical element regulator (23) arranged in the optical tool hole (22) and a light-reflecting inclined frame seat (32) capable of converting light paths are arranged. The optical tool regulator can realize five-dimensional fine adjustment in the X direction, Y direction, Z direction, pitching direction and the direction of left and right rotation, and also can convert the light paths by 90 degrees and is provided with square optical elements. The tight positioner (5) is directly connected with the regulating seat (2), and coats the periphery of the mirror bracket (4), a plurality of screw holes are uniformly formed at the periphery of the lateral surface of the tight positioner, and the tight positioner butts against the mirror bracket (4) fixedly through bolts, so that the optical elements work reliably and stably for a long time.

The invention discloses a magnesia nano-catalyst material for a high-energy solid propellant and a synthesis method thereof, and relates to both nano-science and high energy solid propellant fields. The method comprises the steps of dissolving magnesium acetate in absolute alcohol and conducting solvent thermal treatment at the temperature ranging from 160 to 20 DEG C to get a magnesic precursor; and placing the precursor into a muffle furnace and conducting calcination at the temperature of 450 DEG C for 2 hours to get white MgO nano-catalyst. The material has a specific surface area of 230 m2 / g and an aperture of 5nm. The temperature of ammonium perchlorate high-temperature decomposition is reduced by 78 DEG C and the apparent heat of decomposition is increased to 1059 J / g from the previous 371 J / g.

The invention discloses a nanometer material applicable to photothermal therapy and a preparation method thereof. The material designed by the invention has extremely-high photothermal conversion efficiency. According to the invention, hydrophobic Cu7S4 nanocrystalline is obtained by thermal decomposition of a single precursor; and on the premise that the original structure of the material is maintained, the surface properties of the material are changed by coating of an amphiphilic polymer, and the material is converted into an aqueous phase so as to obtain a monodisperse flake-assembly nanometer material, a monodisperse rod-assembly nanometer material and a nanometer superlattice nanometer material are obtained. Under same conditions, photothermal conversion efficiencies of the monodisperse flake-assembly and monodisperse rod-assembly Cu7S4 nanometer particles are 48.62% and 56.32%, respectively; while the photothermal conversion efficiency of the Cu7S4 nanometer superlattice is strongest and stable under irradiation of near-infrared light with a wavelength of 808 nm, reaching 65.7%. The application of the nanometer material in in-vitro photothermal therapy of cancer cells shows that the nanometer material provided by the invention is expected to be a medicament of photothermal therapy, so widespread concerns can be caused in the fields of material science, nanometer science, biological medicine, etc.

The invention discloses a nanoprobe applied to <19>F magnetic resonance imaging and photothermal therapy and a preparation method of the nanoprobe. According to the invention, a one-step packaging method is adopted, and perfluor crown-ether is fixed to nano-particles Cu1.75S through polysuccinimide modified by alkyl chains and trimethoxyoctadecylsilane, so that the nanoprobe applied to <19>F magnetic resonance imaging and photothermal therapy is obtained. According to the nanoprobe synthetize by adopting the preparation method, due to the inside Cu1.75S core, and polyamino acid and silicon layers coating the surface, the nanoprobe has relatively high biological stability. The in-vivo magnetic resonance imaging and the photothermal therapy effects prove that the nanoprobe is expected to serve as a multi-function reagent for carrying out the local photothermal therapy under the guidance of the <19>F magnetic resonance imaging with high sensitivity, the result can attract extensive attention in the fields of material science, nanometer science, biological medicine and the like, and the nanoprobe is suitable for being applied in biomedical detection.

The invention relates to nano-microspheres, in particular to a preparation method of single-layer closely-arranged nano-microsphere arrays. The method includes the steps that substrates are placed in a built single-layer closely-arranged nano-microsphere array preparation device at certain positions and in certain directions, nano-microspheres are densely arranged on the water surface in a single layer through the buoyancy of water and the action of a surfactant, a second substrate clamp support loaded with the nano-microsphere arrays to be arranged is slowly and horizontally moved, the second substrate is placed under a water surface single-layer closely-arranged nano-microsphere area, then the water is slowly drained to transfer the nano-microsphere arrays to the surface of the second substrate, and annealing is performed to closely arrange the nano-microsphere arrays on the second substrate. The device is low in cost, simple in structure and easy and convenient to operate and hardly causes liquid surface fluctuation. Besides the two-dimensional structure characteristic application, the formed nano-microsphere arrays can also be used for preparing large-area two-dimensional nano-spherical-shell arrays, two-dimensional nano-particle arrays and two-dimensional heterojunction nano-thin-layer arrays with finer structures as nano-microsphere templates and are suitable for the fields of nano-science, nano-processing engineering and the like.

The present invention involves a nanometer bomb which in the dimension of macro-nanometer and is designed on the base of nanometer carbon tube singular light quantum performance and near-infrared laser radiation, belongs to the technology field of nanometer science and quantum optics. It is composed by single wall nanometer carbon tube (1) which two ends are open and laser initiating device (2), the nanometer carbon tube (1) explores under the initiating of certain wave length and laser (2) in certain energy density. And said nanometer carbon tube (1) is single wall nanometer carbon tube which two ends are open, diameter of carbon tube is 1-3nm and the length is 100-400nm; the wave length of the laser used for initiating is 700-900nm, the energy density of the laser is 600-1200mW / cm2. The explosion can generate in micrometer even nanometer dimension, and the explosion scope can be controlled precisely. The invention can apply to biomedical and related fields widely.

The invention discloses a process for graph carbon nanometer tube, belongs to field of nanometer science and technology. The said means mainly uses the force of functionalization organosilane self assembling monolayer film surface force to the carbon nanometer tube in the DMF and the SDS dispersion to graph the single, multilayer film or array of the carbon nanometer tube. Forming graph on the surface in photoetching process, and then assembling different self assembly film on the different surface or area of the gragh, forming single-layer or multilayer construction graph carbon nanometer tube in precipitation and casting art work using the nature of different area and different surface of the graph film. The means can easily form carbon nanometer tube graph on glass, silicon chip or plastic, and also can form carbon nanometer tube array graph on aluminium and other metal. The invention is provided with latent application value in artwork of making panel display screen, transistor, and chemical and biology sensor and semiconductor device.

The invention relates to a nanofluidic channel preparation method based on a template-induced cracking effect, which belongs to the fields of micro-nanostructure processing and biochemistry. According to the distribution of a target nanofluidic channel, a patterned structure with nano-microtips is designed and processed as an inducing template; a polished substrate is chosen as a substrate of the nanofluidic channel, and a layer of high-molecular polymer material with high volume shrinkage is applied on the surface of the substrate; the inducing template is aimed at and imprints the polymer material film layer, and the polymer material is cured; because the volume of the polymer material is shrunk during curing and crosslinking and the microtip nanostructure serves as an outside inducing point of cracking, when the volume shrinkage force of the material is higher than internal stress, the polymer material is induced to crack in the process of curing, so that a crack channel is formed along the pattern of the microtip structure, and thereby the nanofluidic channel is prepared. The method based on the nanoimprinting process and the template-induced cracking effect is easy to operate, the cost is low, the structure is controllable, and the method has a broad application prospect in the field of nanoscientific and nanotechnological studies.

The invention relates to the field of nanoscale science and technology, and discloses magnetic liquid based on oxidation-resistant alpha olefin synthetic oil and a preparation method of the magnetic liquid based on the oxidation-resistant alpha olefin synthetic oil. The magnetic liquid comprises magnetic nano-particles, surfactants and carrier liquid, and is characterized in that the magnetic nano-particles are ferrite-class magnetic particles DxM1-xFe2O4, wherein the D and the M are Co, Mn, Ni, Mg or Zn, and x=0-1, and the carrier liquid is the alpha olefin synthetic oil or mixed oil with the alpha olefin synthetic oil and other basic oil. According to the magnetic liquid based on the oxidation-resistant alpha olefin synthetic oil and the preparation method of the magnetic liquid based on the oxidation-resistant alpha olefin synthetic oil, the DxM1-xFe2O4 magenetic particles are small in particle diameter, overcome the defects that existing magnetic liquid is poor in oxidation resistance and stability, and the like, are good in oxidation resistance, good in modification effect, and are capable of being dispersed in the carrier liquid, and good magnetic performance can be kept for a long time under a high-temperature environment. The preparation method of the magnetic liquid based on the oxidation-resistant alpha olefin synthetic oil is simple in operation, high in production efficiency, and low in requirement on equipment, and has good application prospects.

A closed-loop operating method and operating platform for nano members under SEM (scanning electron microscope) are provided. Studies on the closed-loop operating method and operating platform for nano members under SEM may provide theoretical basis and practical methods for the stable operation of nanoscale members and are more of important theoretical and practical significance to promoting thefurther development of related studies in the fields of China, such as NEMS (nano electro mechanical systems), bioengineering, photoelectric engineering and nano science. Work proceeded in projects includes basic studies, manly focused on providing related theories, methods and control strategies for the real-time efficient three-dimensional visual operation of nanoscale members in terms of mechanism and methodology, the development and functionalization of nano operating techniques can be substantially promoted, the method and platform are of important theoretical significance and practical value, and a platform is provided for system industrialization toward the fields, such as bioengineering, photoelectric engineering and information storage.

The invention discloses a process for graph carbon nanometer tube, belongs to field of nanometer science and technology. The said means mainly uses the force of functionalization organosilane self assembling monolayer film surface force to the carbon nanometer tube in the DMF and the SDS dispersion to graph the single, multilayer film or array of the carbon nanometer tube. Forming graph on the surface in photoetching process, and then assembling different self assembly film on the different surface or area of the gragh, forming single-layer or multilayer construction graph carbon nanometer tube in precipitation and casting art work using the nature of different area and different surface of the graph film. The means can easily form carbon nanometer tube graph on glass, silicon chip or plastic, and also can form carbon nanometer tube array graph on aluminium and other metal. The invention is provided with latent application value in artwork of making panel display screen, transistor, and chemical and biology sensor and semiconductor device.

The invention relates to an optical tool regulator for an excimer laser micromachining system, which belongs to the technical field of micro-nanoscale science and is used for MEMS machining. In the optical tool regulator, a sliding seat (1) is arranged on an optical guide rail; a regulating seat (2), a supporting plate (3), a mirror bracket (4) and a tight positioner (5) are sequentially arrangedon the sliding seat (1); the mirror bracket (4) is provided with an optical tool hole (22) capable of accommodating a circular optical element with heavy caliber; and a square optical element regulator (23) arranged in the optical tool hole (22) and a light-reflecting inclined frame seat (32) capable of converting light paths are arranged. The optical tool regulator can realize five-dimensional fine adjustment in the X direction, Y direction, Z direction, pitching direction and the direction of left and right rotation, and also can convert the light paths by 90 degrees and is provided with square optical elements. The tight positioner (5) is directly connected with the regulating seat (2), and coats the periphery of the mirror bracket (4), a plurality of screw holes are uniformly formed at the periphery of the lateral surface of the tight positioner, and the tight positioner butts against the mirror bracket (4) fixedly through bolts, so that the optical elements work reliably and stably for a long time.

The invention relates to Ni-Ag nano material used by an anode of an oxide fuel cell and a synthesizing method thereof, which relates to a field of nano science and oxide fuel cell. Nickel nitrate and silver nitrate are dissolved in anhydrous ethanol solvent and is added with ethanol solution of sodium hydroxide after being fully stirred. The obtained mixture is filled separately in a reaction kettle and is heated up to 160-220 DEG C, and then the heat is preserved. After reaction, the mixture is cooled to the room temperature, washed and dried. The material has diameter of 10-30mm and a spherical shape. At the temperature of 800 DEG C, the highest open circuit voltage of a single cell can reach 0.997 V, and the power density can reach 52.34 mW / cm<2>.

The invention belongs to the technical fields of material chemistry, nano science and catalytic chemistry as well as medical field and in particular relates to applying a 'one pot' synthesis to prepare magnetic nano crystalline with a high solubility and a high crystallinity in neutral water and a preparation method thereof. The technique of the invention is characterized by applying solvent with a high boiling point, catalytic function, reducing function and polymerization function to carry out thermal decomposition for organometallic precursors or metal inorganic salt compound, so as to form magnetic nano crystalline, realize the modification in situ of water-soluble polymer on the surface of the nano crystalline and obtain water-soluble nano crystalline with a high solubility at the same time. The crystalline is mainly characterized in that: the crystalline can be dissolved in neutral water (PH=6-8); the formed solution keeps stability for a long time; the main inorganic elements include iron, cobalt, nickel, manganeses and oxide thereof; the crystalline is in a ball shape or in a petal shape; the shape and size control is realized by controlling the concentration and heating-up time for the precursors of the magnetic nano crystalline-the organic precursors or the inorganic salt.

The invention relates to the technical field of organic nanometer science and discloses iridium metal coordination compound organic fluorescent nanoparticles. The nanoparticles have the characteristics of rectangular or square shape, sizes between 400 nanometers and 3,000 nanometers, structures shown as a formula I, high optical property, capability of emitting red fluorescent light of about 635 nanometers and important potential value in the field of optical function organic nanomaterials. In the preparation method of the nanomaterial, a pyridine-containing cationic metal iridium coordination compound reacts with carboxylic acid under the action of super-molecular self-assembly. The invention has the advantages of simplicity in operation, mild condition, low equipment requirement, environmental friendliness and the like.

The invention relates to the field of organic nanoscale science and technology and discloses an iridium complex organic fluorescence nano particle and a synthetic method thereof; the transformation of the nano particle from zero dimension to one dimension can be realized through changing concentration of reaction liquid; the structure of the nano particle is shown as formula (I); and the nano particle has excellent optical property, can emit red fluorescence ranging from 560-600nm, and has significant potential application value in the optical property organic nano material field. The nano material is formed by cationoid metal iridium complex containing carboxylic acid and 1, 3, 5-three (4, 5-dihydro-1-hydrogen-imidazole-2-base) benzene (Tib) through supramolecular self-assembly function. The synthetic method has the advantages of easiness in operation, moderate condition, low requirement on equipment, no pollution and the like.

The invention relates to a nanofluidic channel preparation method based on a template-induced cracking effect, which belongs to the fields of micro-nanostructure processing and biochemistry. According to the distribution of a target nanofluidic channel, a patterned structure with nano-microtips is designed and processed as an inducing template; a polished substrate is chosen as a substrate of the nanofluidic channel, and a layer of high-molecular polymer material with high volume shrinkage is applied on the surface of the substrate; the inducing template is aimed at and imprints the polymer material film layer, and the polymer material is cured; because the volume of the polymer material is shrunk during curing and crosslinking and the microtip nanostructure serves as an outside inducing point of cracking, when the volume shrinkage force of the material is higher than internal stress, the polymer material is induced to crack in the process of curing, so that a crack channel is formed along the pattern of the microtip structure, and thereby the nanofluidic channel is prepared. The method based on the nanoimprinting process and the template-induced cracking effect is easy to operate, the cost is low, the structure is controllable, and the method has a broad application prospect in the field of nanoscientific and nanotechnological studies.

The invention relates to high-performance gamma-Fe2O3 magnetofluid and a preparation method of the high-performance gamma-Fe2O3 magnetofluid, and belongs to the technical field of nanoscale science and technology and material preparation. The preparation method is characterized in that magnetic nanometer particles are prepared through a chemical coprecipitation method, after ferrous salt solutions and ferric salt solutions are evenly mixed, superfluous alkaline solutions are added till complete reaction is finished, then moderate surfactants are added and surface modification treatment is conducted, and finally the magnetic nanometer particles are obtained after sediment is conducted; after the magnetic Fe3O4 nanometer particles are cleaned and dried, the gamma-Fe2O3 magnetic particles are obtained after the cleaned and dried gamma-Fe2O3 magnetic particles are subjected to oxidation at a certain temperature in a certain time period; quantitative surfactants and carrier liquids are added to a gamma-Fe2O3 magnetic particle solution , dispersion is conducted, and the high-performance gamma-Fe2O3 magnetofluid is obtained. The high-performance gamma-Fe2O3 magnetofluid prepared through the preparation method is simple in process and high in specific magnetization, and industrial batch production can be achieved conveniently.

The invention relates to nano-microspheres, in particular to a preparation method of single-layer closely-arranged nano-microsphere arrays. The method includes the steps that substrates are placed in a built single-layer closely-arranged nano-microsphere array preparation device at certain positions and in certain directions, nano-microspheres are densely arranged on the water surface in a single layer through the buoyancy of water and the action of a surfactant, a second substrate clamp support loaded with the nano-microsphere arrays to be arranged is slowly and horizontally moved, the second substrate is placed under a water surface single-layer closely-arranged nano-microsphere area, then the water is slowly drained to transfer the nano-microsphere arrays to the surface of the second substrate, and annealing is performed to closely arrange the nano-microsphere arrays on the second substrate. The device is low in cost, simple in structure and easy and convenient to operate and hardly causes liquid surface fluctuation. Besides the two-dimensional structure characteristic application, the formed nano-microsphere arrays can also be used for preparing large-area two-dimensional nano-spherical-shell arrays, two-dimensional nano-particle arrays and two-dimensional heterojunction nano-thin-layer arrays with finer structures as nano-microsphere templates and are suitable for the fields of nano-science, nano-processing engineering and the like.

The invention relates to the field of organic nanoscale science and technology and discloses an iridium complex organic fluorescence nano particle and a synthetic method thereof; the transformation of the nano particle from zero dimension to one dimension can be realized through changing concentration of reaction liquid; the structure of the nano particle is shown as formula (I); and the nano particle has excellent optical property, can emit red fluorescence ranging from 560-600nm, and has significant potential application value in the optical property organic nano material field. The nano material is formed by cationoid metal iridium complex containing carboxylic acid and 1, 3, 5-three (4, 5-dihydro-1-hydrogen-imidazole-2-base) benzene (Tib) through supramolecular self-assembly function. The synthetic method has the advantages of easiness in operation, moderate condition, low requirement on equipment, no pollution and the like.

Shape controlled synthesis of ferroelectric nanocrystals such as barium titanate (BaTiO3) nanocrystals is described. By tuning the molar ratio between the surfactant and the metal precursors, BaTiO3 nanocrystals with different shapes are readily obtained. This provides the nanoscopic ferroelectric building blocks for the fabrication of various electronic devices, as well as for fundamental research in nanoscience and nanotechnology.

A nano dielectric layer preparation method based on a thermal oxidation process of the invention belongs to the technical field of microelectronics, solid-state electronics and nano science. A square mask window is opened on a base metal layer by electron beam lithography. The base metal layer exposed at the mask window is oxidized by a thermal oxidation method. The specific process conditions are as follows: a silicon wafer is put in a drying oven and heated at 150-200 DEG C for 15-60min, the silicon wafer is immersed in butanone reagent for heating and ultrasonic processing, and mask stripping is completed. Characterization results show that the nano dielectric layer preparation method based on a thermal oxidation process can be used to prepare a dielectric layer film with certain oxidation ratio and certain thickness successfully. A dielectric layer is generated on the surface of the base metal layer in one step through in-situ oxidation. The preparation process is simple. No material needs to be added. The interface is highly coherent and has fewer defects. The method is expected to be widely used in scientific research and production.

The invention provides a closed-loop operation control method for a nano-scale component under SEM and a design scheme for an operation platform. Researches on the closed-loop operation control methodfor the nano-scale component under SEM and the design scheme for the operation platform provide a theoretical basis and a practical method for stable operation of the nano-scale component, and have important theoretical and practical significance on promoting further development of related studies in fields like NEMS, bioengineering, photoelectric engineering and nanoscience in China. The closed-loop operation control method provided by the invention carries out the work belonging to a basic research, mainly focuses on providing relevant theories, methods and control strategies for real-time,highly-efficient and three-dimensionally visible operation of the nanoscale component in the aspects of mechanisms and methods, can fundamentally promote development and practicality of a nanoscale operartion technology, has important theoretical significance and practical values, and provides a platform for industrialization of a system to the fields of bioengineering, photoelectronic engineering, information storage, etc.