Nanofluidic channel preparation method based on template-induced cracking effect

A nano-channel and template technology, applied in the application of thermal effects to detect fluid flow, separation methods, chemical instruments and methods, etc., can solve the problems of long scanning time, technical difficulties, low processing efficiency, etc., and achieve good controllability and repeatability performance, high efficiency and low cost

Active Publication Date: 2015-02-04
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This not only brings great technical difficulties, but also the cost of research and development will soar sharply; another nanostructure processing method is to process through direct writing equipment such as electron beam and focused ion beam. Focusing on point-by-point processing of materials requires long scanning time and low processing efficiency. It is difficult to produce nanostructures with an area of ​​200 microns, and expensive electron beam lithography and ion beam lithography equipment and their production costs are unaffordable , it is not easy to carry out relevant work in general laboratories, therefore, these two manufacturing technologies are difficult to meet the large demand for nanochannels in scientific research and production

Method used

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  • Nanofluidic channel preparation method based on template-induced cracking effect
  • Nanofluidic channel preparation method based on template-induced cracking effect
  • Nanofluidic channel preparation method based on template-induced cracking effect

Examples

Experimental program
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Effect test

example 1

[0030] Such as figure 1 As shown in 1-1, select a piece of polydimethylsiloxane (PDMS) sheet 1 with a surface polishing thickness of 1 mm and an area of ​​2 cm × 2 cm, and use a mixture of alcohol and acetone to clean its surface , remove the stains on the surface, and dry it for later use;

[0031] Such as figure 1 As shown in middle 1-2, use the glue homogenizer, set the speed at 2000 rpm, spin-coat a layer of UV-curable mercapto-ene material 2 with a thickness of 150 nm on the PDMS plate, and the spin-coating accuracy is ±3 nm, The uniformity is ±3%;

[0032] Such as figure 1 As shown in 1-3, a piece of porous alumina with a pore diameter of 500 nm and an edge width of 30 nm is used as the imprint induction template 3, and the induction template 3 is gently attached to the sulfhydryl group by aligning the imprint process 4 -On the olefin material film layer 2, since PDMS is elastic, it can be in conformal contact with the template without external pressure, and no air b...

example 2

[0036] Such as figure 2 As shown in 2-1, select a single-sided polished silicon wafer with an area of ​​2 cm x 2 cm as the substrate 1, clean the surface with a mixture of alcohol and acetone, remove the stains on the surface, and dry it before use ;

[0037] Such as figure 2 As shown in middle 2-2, use the glue homogenizer, set the speed at 1500 rpm, spin-coat a layer of UV-curable mercapto-ene material 2 with a thickness of 200 nanometers on the PDMS plate, and the spin-coating accuracy is ±3 nanometers, The uniformity is ±3%;

[0038] Such as figure 2 As shown in 2-3, a ring-shaped microtip nanostructure with a period of 200 nanometers and a microtip size of 20 nanometers is used as the imprint induction template 3, and the induction template 3 is gently attached by aligning the imprint process 4 On the mercapto-ene material film layer 2, a pressure of 2 Pa is applied from the outside, so that the induced template 3 is in conformal contact with the material, and no a...

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Abstract

The invention relates to a nanofluidic channel preparation method based on a template-induced cracking effect, which belongs to the fields of micro-nanostructure processing and biochemistry. According to the distribution of a target nanofluidic channel, a patterned structure with nano-microtips is designed and processed as an inducing template; a polished substrate is chosen as a substrate of the nanofluidic channel, and a layer of high-molecular polymer material with high volume shrinkage is applied on the surface of the substrate; the inducing template is aimed at and imprints the polymer material film layer, and the polymer material is cured; because the volume of the polymer material is shrunk during curing and crosslinking and the microtip nanostructure serves as an outside inducing point of cracking, when the volume shrinkage force of the material is higher than internal stress, the polymer material is induced to crack in the process of curing, so that a crack channel is formed along the pattern of the microtip structure, and thereby the nanofluidic channel is prepared. The method based on the nanoimprinting process and the template-induced cracking effect is easy to operate, the cost is low, the structure is controllable, and the method has a broad application prospect in the field of nanoscientific and nanotechnological studies.

Description

technical field [0001] The invention belongs to the field of micro-nano structure processing and biochemistry, and in particular relates to a method for preparing a nano-flow channel based on template-induced cracking effect. Background technique [0002] With the development of advanced micro-nano processing technology, micro-nano structures have more and more applications in optics, electronics, biochemistry, etc. The application prospect of nanochannel structure in biochemistry has aroused people's great attention. DNA isolation is an important means of nucleic acid analysis, and plays an important role in biological functional gene sequencing, biometric fingerprinting, forensic evidence, identification of pathogens and genetic diseases, etc. Standard gel electrophoresis is the mainstay of DNA separation, but it cannot separate DNA longer than 40,000 base pairs. In response to this problem, some research groups have realized nanofluidic DNA separation chips by using opt...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B1/00B01L3/00
Inventor 邓启凌张满史立芳秦燕云曹阿秀庞辉
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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