Tangential driving double-difference butterfly-wing silicon microgyroscope and application method thereof

Abstract

The invention discloses a tangential driving double-difference butterfly-wing silicon microgyroscope and an application method thereof. The silicon microgyroscope is of a silicon-glass double-layer structure which is constituted by a silicon sensitive structure and a glass electrode plate, the silicon sensitive structure comprises an external framework, an internal coupling spring structure and two silicon sensitive subsidiary structures, each silicon sensitive subsidiary structure comprises four inertial mass blocks which are connected to a supporting beam through a cantilever beam, driving comb teeth are arranged on the inertial mass blocks, a driving electrode, a detecting electrode and an electrode welding disc are arranged on the glass electrode plate, and detecting capacitors of thetwo silicon sensitive subsidiary structures constitute a double-difference slab detecting capacitor. The application method comprises the step of additionally applying static electrostatic stiffness to a unilateral silicon sensitive structure to change a modal control method of the system modal frequency. By means of the tangential driving double-difference butterfly-wing silicon microgyroscope and the application method thereof, the limit of normal displacement on driving amplitude and capacitive gaps can be effectively removed, the driving Q value can be effectively increased, the working state of the gyroscope is improved, thus the sensitivity of the gyroscope is improved, the bandwidth of the gyroscope is increased, and the stability of the gyroscope is improved.

Description

technical field [0001] The invention relates to micromechanical sensor technology in microelectromechanical systems, in particular to a tangentially driven double-differential butterfly-wing silicon microgyroscope and an application method thereof. Background technique [0002] Compared with traditional mechanical gyroscopes, micro-mechanical gyroscopes based on MEMS technology have outstanding advantages such as small size, light weight, low cost, and high reliability, and have been more and more widely used in various fields. Take the butterfly-wing silicon micro-gyroscope as an example. It is a capacitive micro-electro-mechanical gyroscope based on the Coriolis effect, which adopts the working mode of electrostatic drive and capacitance detection. The traditional butterfly-wing micro-gyroscope was first proposed by the Swedish IMEGO Institute. Its sensitive structure is a four-mass fully differential structure, which uses anisotropic wet etching of single crystal silicon ...

AI Technical Summary

Problems solved by technology

The traditional butterfly-wing micro-gyro sensitive structure has a driving mode and a detection mode. In the structural design, when the detection mode of the micro-gyroscope coincides with the driving mode (that is, mode matching), the sensitivity is the highest, but at this time The working mode of the micro-gyroscope is poorly adapted to the environment and the stability is not high

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