Method of manufacturing closed porous piezoelectret energy harvester based on nanoimprint

Abstract

The invention discloses a method of manufacturing a closed porous piezoelectret energy harvester based on nanoimprint. Manufacturing and processing of an imprint mold are firstly carried out; preparation of a piezoelectret thin film is then carried out; imprint and demolding are carried out to obtain a porous thin film of the piezoelectret; multiple porous thin films are bonded to form a multilayer closed porous film; corona electret is carried out; and finally, working electrode sputtering at two ends of the multilayer closed porous film is carried out. The closed porous cavity can greatly improve the charge storage intensity and the stability, the multilayer porous structure can improve the electro-mechanical conversion efficiency, and the output of the energy harvester is improved.

Description

technical field [0001] The invention belongs to the technical field of micro-nano manufacturing, and in particular relates to a method for preparing a closed porous piezoelectric electret energy harvester based on nanoimprinting. Background technique [0002] With the development of new materials and the advancement of nano-manufacturing technology, the combination of flexible electronic technology and nano-technology has achieved rapid development. The new generation of electronic devices is developing towards flexibility, multi-function, and miniaturization. Flexible light-emitting displays and flexible transistor arrays have been developed one after another, playing an important role in information exchange, health diagnosis, and environmental monitoring. At the same time, the number of wearable electronics is also increasing day by day, and the sustainable power supply of these huge quantities of flexible electronic devices has become a new challenge. At present, the pi...

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Problems solved by technology

This kind of pressure expansion process is often used in the forming of polypropylene porous membrane, which is selective to materials and is difficult to apply to other electret materials; and the process is difficult to effectively control the size of the pores, and the porous membrane often presents a layered distribution, and the formed pores have no An effective closed chamber is formed, so the space charge formed after corona polarization is easily affected by environmental factors such as humidity, which affects output stability

In addition, the size, density and distribution of pores in porous structure electret will affect the electric field distribution inside the structure and the elastic modulus of the material as a whole, thus affecting the charge trapping density and electromechanical conversion performance.

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