Processing method of metal nanonetwork flexible glass

Abstract

The invention relates to a processing method of metal nanonetwork flexible glass. The processing method comprises the following steps of preparing a SiO2 film on a silicon wafer as a sacrificial layer; preparing a GZO film, an AZO film or a ZnO film on the sacrificial layer as a cover layer; adding dropwise dilute HNO3 on the cover layer so as to erode the cover layer, so that intergranular cracksare obtained; then adding dropwise HF so as to erode the SiO2 film under the intergranular cracks; sputtering and growing an Ag metal film; soaking in HCl so as to remove the GZO film from the coverlayer; soaking in HF so as to remove the SiO2 film, so that a metal Ag nanonetwork is obtained; and transferring to a PET flexible transparent substrate coated with EVA optical cement, so that the metal nanonetwork transparent conductive glass is obtained. The processing method has the advantages that on the basis of the large-particle GZO film, the AZO film or the ZnO film which is developed andobtained, magnetron sputtering and wet etching are combined, so that the metal nanonetwork transparent conductive glass which has the advantages of easiness in adjusting and controlling the metal nanonetwork structure and simplicity and convenience in manufacturing is obtained.

Description

technical field [0001] The invention relates to the technical field of glass processing, in particular to a processing method of metal nano network flexible glass. Background technique [0002] High-performance transparent electrodes are essential in many optoelectronic devices, such as touch screens, photovoltaic cells, optoelectronic detectors, photovoltaic devices, thin film (photo) transistors, liquid crystal displays, sensors, thermal reflectors, etc. At present, transparent conductive electrodes generally use metal oxides, such as ITO films, but the key metal element indium in ITO oxide electrodes has limited reserves. With the popularity of products such as liquid crystal displays and touch screens, the price of indium has risen sharply. At the same time, indium tin oxide transparent electrodes lack flexibility, are not easy to bend, and have poor chemical stability, so they are not suitable for flexible transparent electrodes. [0003] At present, researchers have b...

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Problems solved by technology

[0004] At present, for the preparation of metal nano-network transparent conductive glass, there are mainly the following processes at home and abroad: (1) Use the pressure generated by rolling the rolling bar on the surface of the fixed substrate to disperse the silver nanowires AgNWs dropped on the surface of the substrate to form a thin film , these AgNWs electrodes can have different densities and surface resistances by controlling the concentration; however, this method cannot keep the extrusion force constant during the rolling process, resulting in uneven distribution of the silver nanowires and spreading on the substrate after rolling. The liquid film on the surface of the sheet is prone to agglomeration of silver nanowires during the drying process, which increases the contact resistance; (2) Inkjet printing and coffee ring effect are combined, and inkjet printing of silver nanoparticle ink on the substrate forms a line-shaped grid. Widely limited by the size of the nozzle and the size of silver nanoparticles, but the cost of processing equipment used in this process is relatively high; (3) grain boundary printing, this process has the disadvantages of complicated process and high production cost

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