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A method for preparing a metal nano-network flexible panel for electronic information display

A metal nano-network and flexible panel technology, which is applied in cable/conductor manufacturing, metal/alloy conductors, circuits, etc., can solve problems such as complex process, silver nanowire agglomeration, and increased contact resistance

Active Publication Date: 2019-08-23
(CNBM) BENGBU DESIGN & RES INST FOR GLASS IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] At present, for the preparation of metal nano-network transparent conductive flexible panels, there are mainly the following processes at home and abroad: (1) Use the pressure generated by rolling the rolling bar on the surface of the fixed substrate to disperse the silver nanowires AgNWs dropped on the surface of the substrate to form These AgNWs electrodes can have different densities and surface resistances by controlling the concentration; however, this method cannot keep the force of extrusion during the rolling process unchanged, resulting in uneven distribution of silver nanowires and spreading on the surface after rolling. The liquid film on the surface of the substrate is prone to agglomeration of silver nanowires during the drying process, which increases the contact resistance; (2) Inkjet printing and coffee ring effect are combined to inkjet print silver nanoparticle ink on the substrate to form a line grid. The line width is limited by the size of the nozzle and the size of the silver nanoparticles, but the cost of the processing equipment used in this process is relatively high; (3) grain boundary printing, this process has the disadvantages of complex process and high production cost

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  • A method for preparing a metal nano-network flexible panel for electronic information display
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Embodiment 1

[0029] Such as figure 1 with figure 2 As shown, the method for preparing a metal nano-network flexible panel for electronic information display provided by the present invention includes the following steps:

[0030] S1, using silicon ceramic as the substrate, placing the substrate in the magnetron sputtering chamber, using Ar ion as the sputtering gas, O 2 As a reactive gas, the radio frequency power is applied to the cathode, and the preparation temperature is kept at room temperature; the sputtering power is 250W, the working pressure is 0.5Pa, the target voltage is 87V, the distance between the substrate and the target is 70mm, and SiO is prepared. 2 Sacrificial layer with a film thickness of 300 nm.

[0031] S2, using magnetron sputtering method, in SiO 2 GZO film is prepared on the film as a covering layer, GZO ceramic target is used, Ar ion is used as sputtering gas, DC power is applied to the cathode, the sputtering power is 300W, the working pressure is 0.2Pa, the target v...

Embodiment 2

[0040] The invention provides a method for preparing a metal nano-network flexible panel for electronic information display, including the following steps:

[0041] S1, using silicon ceramic as the substrate, placing the substrate in the magnetron sputtering chamber, using Ar ion as the sputtering gas, O 2 As a reactive gas, the radio frequency power is applied to the cathode, and the preparation temperature is kept at room temperature; the sputtering power is 250W, the working pressure is 0.5Pa, the target voltage is 87V, the distance between the substrate and the target is 70mm, and SiO is prepared. 2 Sacrificial layer with a film thickness of 300 nm.

[0042] S2, using magnetron sputtering method, in SiO 2 AZO film is prepared on the film as a covering layer, AZO ceramic target is used, Ar ion is used as sputtering gas, DC power is applied to the cathode, the sputtering power is 350W, the working pressure is 0.2Pa, the target voltage is 441V, and the flexible panel substrate is T...

Embodiment 3

[0051] The invention provides a method for preparing a metal nano-network flexible panel for electronic information display, including the following steps:

[0052] S1, using silicon ceramic as the substrate, placing the substrate in the magnetron sputtering chamber, using Ar ion as the sputtering gas, O 2 As a reactive gas, the radio frequency power is applied to the cathode, and the preparation temperature is kept at room temperature; the sputtering power is 250W, the working pressure is 0.5Pa, the target voltage is 87V, the distance between the substrate and the target is 70mm, and SiO is prepared. 2 Sacrificial layer with a film thickness of 300 nm.

[0053] S2, using magnetron sputtering method, in SiO 2 ZnO film is prepared on the film as a covering layer, ZnO ceramic target is used, Ar ion is used as sputtering gas, DC power is applied to the cathode, sputtering power is 400W, working pressure is 0.2Pa, target voltage is 468V, flexible panel substrate The pitch of the target ...

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Abstract

The invention relates to a preparation method of a metal nano-network flexible panel for electronic information display. The method includes the following steps that a SiO2 thin film is prepared on asilicon slice as a sacrificial layer; a GZO thin film, an AZO thin film or a ZnO thin film are prepared on the sacrificial layer as a covering layer; diluted HNO3 is dropped on the covering layer, thecovering layer is corroded to obtain cracks between particles; then HF is dropped to corrode the SiO2 thin film under the cracks between the particles; an Ag metal thin film is produced by sputtering; the GZO thin film is removed by HCI immersion, HF immersion is carried out to remove the SiO2 thin film to obtain a metal Ag nano-network; the metal Ag nano-network is transferred to a PET flexibletransparent substrate coated with EVA optical cement to obtain a metal Ag nano-network transparent conductive flexible panel. The preparation method has the advantages that on the basis of preparing the large-particle GZO thin film, AZO thin film or ZnO thin film, combined with magnetron sputtering and wet etching, the metal nano-network transparent conductive flexible panel is obtained, wherein the metal nano-network structure is easy to regulate and the manufacture is simple and convenient.

Description

Technical field [0001] The invention relates to the technical field of flexible panel processing, in particular to a method for preparing a metal nano-network flexible panel for electronic information display. Background technique [0002] High-performance transparent electrodes are indispensable in many optoelectronic devices, such as touch screens, photovoltaic cells, photoelectron detectors, photovoltaic devices, thin film (photoelectric) transistors, liquid crystal displays, sensors, heat reflectors and other fields. Currently, transparent conductive electrodes generally use metal oxides, such as ITO films, but the key metal element indium in ITO oxide electrodes is limited. With the popularity of liquid crystal displays and touch screens, the price of indium has risen sharply. At the same time, the indium tin oxide transparent electrode lacks flexibility, is not easy to bend, and has poor chemical stability, and is not suitable for use in flexible transparent electrodes. [0...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01B13/00H01B1/02
Inventor 彭寿仲召进马立云倪嘉韩娜崔介东操芳芳王萍萍高强赵凤阳曹欣单传丽石丽芬王巍巍
Owner (CNBM) BENGBU DESIGN & RES INST FOR GLASS IND CO LTD
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