Micro-lens array capable of reducing optical crosstalk between pixels of polarization imaging device
A technology of microlens array and polarization imaging, which is applied in the field of microlens array, can solve the problems of optical crosstalk and entering adjacent pixels, and achieve the effect of reducing optical crosstalk
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[0020] Prepare a CCD chip with a pixel size of 7.4μm; deposit a silicon dioxide film on the CCD chip, and process the silicon dioxide film by chemical or mechanical polishing to obtain a planarization layer 2; deposit 200nm aluminum on the surface of the planarization layer 2 The aluminum layer is etched into a grating array using an electron beam lithography process. In the grating array, a single sub-wavelength grating 3 has a line width of 140nm, a period of 300nm, and an outer frame width of 340nm; spin-coated on the surface of the grating array Layer polymethyl methacrylate and heat it to cure; use mask photolithography process to etch polymethyl methacrylate into an array corresponding to the pixels; heat to heat the polymethyl methacrylate to obtain a microlens array ; Using photolithography to etch an isolation groove 5 with a width of 800 nm between adjacent microlenses 4. In the prior art, when the microlens array is not provided, the optical crossta...
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