Drying equipment

Abstract

The invention relates to the technical field of photovoltaic silicon wafer manufacturing, in particular to drying equipment. The drying equipment comprises a tank, a heating and temperature control assembly, a fan assembly and a silicon wafer basket supporting part. The tank is arranged in cleaning equipment, and the heating and temperature control assembly is arranged on the inner side wall of the tank. The fan assembly and the silicon wafer basket supporting part are both arranged in the tank, and a silicon wafer basket is placed on the silicon wafer basket supporting part. An air outlet ofthe fan assembly is located below the silicon wafer basket supporting part to blow airflow to the silicon wafer basket, and an air channel is further arranged in the tank. An air inlet of the fan assembly communicates with the air channel to draw the airflow into the fan assembly. According to the drying equipment, the tank is integrated into the cleaning equipment, after silicon wafers are cleaned in the cleaning equipment, the silicon wafer basket is taken out by a mechanical arm and placed on the silicon wafer basket supporting part of the drying equipment, automation of dry inputting and drying outputting is achieved, and a spin dryer in the prior art is replaced; equipment purchase and manpower cost is reduced, and production cost investment is reduced; and meanwhile the equipment capacity is improved, and the requirement of the larger production capacity can be met.

Description

technical field [0001] The invention relates to the technical field of photovoltaic silicon wafer manufacturing, in particular to a drying device. Background technique [0002] The best way to use solar energy is photovoltaic conversion, which is to use the photovoltaic effect to make sunlight shine on silicon materials to generate electricity and generate electricity directly. The photoelectric conversion industry chain formed by the application and development of silicon materials is called "photovoltaic industry", including the production of high-purity polysilicon raw materials, solar cell production, solar cell module production, and related production equipment manufacturing. At present, in the manufacture of photovoltaic silicon wafers, silicon wafers or silicon blocks need to be cleaned and degummed. During the drying process after cleaning, a dryer is usually used to dry the surface moisture of silicon wafers or silicon blocks by centrifugation, but the commonly use...

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Problems solved by technology

[0004] The technical problem to be solved by the present invention is to solve the problem that in the existing photovoltaic silicon wafer production, the drying machine and the cleaning equipment are set independently, the equipment integration is low, the use cost of the drying machine is high, the production capacity is low, and the silicon wafer production efficiency is affected. question

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