TFT substrate and manufacturing method thereof
A manufacturing method and substrate technology, which is applied in semiconductor/solid-state device manufacturing, instruments, semiconductor devices, etc., can solve problems such as difficult control of parameters, peeling of protective layer, poor display of liquid crystal panels, etc., to reduce undercut phenomenon and tilt angle Small, well-displayed effects
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[0031] In order to further illustrate the technical means adopted by the present invention and its effects, the following describes in detail in conjunction with preferred embodiments of the present invention and accompanying drawings.
[0032] The drawings in this application are only schematic diagrams. Unless otherwise specified, they do not mean that the actual thickness ratio, flatness, and shape of each film layer are the same as those in the drawings. There are some differences from the schematic diagram, for example, the shape of the hole and the appearance of the combined part of each film layer will be different from the schematic diagram, which can be understood and known by those skilled in the art. The description of the sequence of process steps and the structure of the film layer in this application only indicates the sequence and relative position of the steps and film layers directly related to the technical problems of this application, and does not mean that ...
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