Light waveguide biosensor with low detection cost and temperature insensitivity

Abstract

The invention relates to a light waveguide biosensor with low detection cost and temperature insensitivity. The light waveguide biosensor comprises a broadband light source in a specific wavelength range, a sensing micro ring, a sensing region, a sensing micro ring straight-through output end, a sensing micro ring downloading output end, a MZI (Mach Zehnder interferometer), a MZI first output end,a MZI second output end, a detector A connected with the MZI first output end and a detector B connected with the second MZI output end, wherein the broadband light source in the specific wavelengthrange is formed by combining an ordinary broadband light source and a wavelength filter in the required wavelength range; the broadband light source in the specific wavelength range is connected withthe sensing micro ring input end; the sensing micro ring downloading output end is connected with the MZI input end; the two output ends of the MZI are connected with the detector A and the detector B. The light waveguide biosensor has the characteristics of temperature insensitivity and low detection cost.

Description

technical field [0001] The invention relates to the field of optical waveguide biosensing detection, in particular to an optical waveguide biosensor which is insensitive to temperature and has low detection cost. Background technique [0002] Optical waveguide sensors based on ring resonators have played a very important role in the analysis of chemical and biological samples due to their advantages such as high sensitivity, label-free detection, real-time monitoring, low sample consumption, and immunity to electromagnetic interference. . In particular, ultra-small micro-rings realized by using a platform with a high refractive index difference (for example, silicon-on-insulator (SOI) platform, a silicon platform on an insulator), because its process is fully compatible with the traditional CMOS process, and is expected to be in the same The hybrid integration with devices such as semiconductor light sources, detectors and microfluidic control units is realized on the chip,...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problem of temperature sensitivity and high detection cost encountered in the detection of traditional sensing micro-rings, to meet its needs in portable and low-cost sensing and detection applications, the present invention provides a sensor based on sensing micro-rings and Mach-Zehnder interferometer cascaded optical waveguide sensor, which is characterized by temperature insensitivity and low detection cost

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