Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

A kind of graphene catalyzed substrate corrosion solution and substrate corrosion method

A catalytic substrate and graphene technology, which is applied in the manufacture of electrical components, circuits, semiconductors/solid-state devices, etc., can solve the problems of destroying the integrity of graphene, graphene pollution, and difficulty in cleaning, so as to achieve good performance and ensure integrity performance, and the effect of increasing the production rate

Active Publication Date: 2020-12-01
BEIHANG UNIV +1
View PDF1 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But there are following defectives in these two kinds of etching methods: nitric acid produces nitric oxide gas in the corrosion process to copper foil substrate, destroys the integrality of graphene; 3 ) solution has impurity Fe to generate during the corrosion process of copper foil, it is difficult to clean, and it will pollute the prepared graphene, etc.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A kind of graphene catalyzed substrate corrosion solution and substrate corrosion method
  • A kind of graphene catalyzed substrate corrosion solution and substrate corrosion method
  • A kind of graphene catalyzed substrate corrosion solution and substrate corrosion method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] A graphene catalyzed substrate corrosion solution, comprising the following components: a phosphoric acid solution with a mass concentration of 5-10%, a glacial acetic acid solution with a mass concentration of 7-12%, and FeCl with a mass concentration of 20-25% 3 Solution, using phosphoric acid solution: glacial acetic acid solution: FeCl 3 Solution=(2-4):(3-6):(5-10) ratio mixing.

[0038] The following examples are the application of the etching solution prepared in Example 1.

Embodiment 2

[0040] A kind of graphene catalysis substrate corrosion method, comprises the following steps:

[0041] (1) Utilize CVD method to grow graphene on copper foil substrate, obtain graphene / copper foil substrate;

[0042] (2) Pick up the graphene / copper foil substrate prepared in step (1) with tweezers, place it in the center of the spin coater, suck up an appropriate amount of photoresist with a straw, and drop it on the graphene-growing side of the graphene / copper foil substrate In the center of the top, turn on the spin coater to spin the photoresist. The spin coating process is divided into two stages: the first stage, the spin coater rotates at 400r / s, and rotates for 10s; the second stage, the spin coater rotates at 1500r / s, rotate 25s;

[0043] (3) After the spin coating is completed, use tweezers to pick up the photoresist / graphene / copper foil substrate, place it on a dryer, and dry it at 100°C for 3 minutes to obtain a dried photoresist / graphene / copper foil substrate;

...

Embodiment 3

[0048] A kind of graphene catalysis substrate corrosion method, comprises the following steps:

[0049] (1) Utilize CVD method to grow graphene on copper foil substrate, obtain graphene / copper foil substrate;

[0050] (2) Pick up the graphene / copper foil substrate prepared in step (1) with tweezers, place it in the center of the spin coater, suck up an appropriate amount of photoresist with a straw, and drop it on the graphene-growing side of the graphene / copper foil substrate In the center of the top, turn on the spin coater for photoresist spin coating. The spin coating process is divided into two stages: the first stage, the spin coater rotates at 500r / s, and rotates for 8s; the second stage, the spin coater rotates at 2000r / s, rotate 20s;

[0051] (3) After the spin coating is completed, use tweezers to pick up the photoresist / graphene / copper foil substrate, place it on a dryer, and dry it at 120°C for 2 minutes to obtain a dried photoresist / graphene / copper foil substrate...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a graphene catalytic substrate corrosion liquid and a substrate corrosion method. A multi-solution compound effect is employed, no bubble is generated during the substrate corrosion process, no damage to the completeness of graphene is generated, the completeness of a graphene layer cannot be damaged by the corrosion liquid, and more importantly, the prepared graphene is pure without impurity and has favorable performance.

Description

technical field [0001] The invention relates to the field of graphene material preparation, in particular to a graphene-catalyzed substrate corrosion solution and a substrate corrosion method. Background technique [0002] Graphene is a two-dimensional crystal that is exfoliated from graphite material and composed of carbon atoms with only one layer of atomic thickness. Graphene is not only the thinnest material, but also the strongest material. The breaking strength is 200 times higher than that of the best steel. At the same time, it has good elasticity, and the stretching range can reach 20% of its own size. Therefore, Graphene is currently the thinnest and strongest material in nature. In addition, graphene is almost completely transparent, absorbing only 2.3% of light, and the structure is so dense that even the smallest gas atoms (helium atoms) cannot penetrate. These characteristics make graphene have a wide range of application space. [0003] At present, most grap...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/205
CPCH01L21/205
Inventor 王三胜赵鹏欧阳晓平
Owner BEIHANG UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com