Preparation method of non-dense ordered polystyrene nanosphere template

A technology of polystyrene nano and spherical templates, which is applied in the direction of nanostructure manufacturing, nanotechnology, nanotechnology, etc., can solve problems such as no public reports, and achieve good controllability, uniform size, and good stability

Inactive Publication Date: 2018-08-07
YUNNAN UNIV
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  • Preparation method of non-dense ordered polystyrene nanosphere template
  • Preparation method of non-dense ordered polystyrene nanosphere template

Examples

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Embodiment 1

[0020] (1) Preparation of single-layer close-packed polystyrene nanosphere film

[0021] A. Select the P-type Si substrate and glass slide with a crystal orientation of (100), ultrasonically clean them with acetone and alcohol for 3 times, each time for 5 minutes, and rinse them with deionized water for 5 times; then wash them with H 2 SO 4 :H 2 o 2 =4:1 solution was boiled for 9 min, rinsed with deionized water for 5 times; finally the Si substrate was washed with HF:H 2 Soak in O=1:10 solution for 40 s, rinse with deionized water for 5 times;

[0022] B. Mix the polystyrene nanosphere solution with a diameter of 200 nm and the methanol solution according to the volume ratio of 1:1, and then use a micro-syringe to slowly flow 40 μL of the mixed solution into deionized water along the glass slide; add surfactant After the nanosphere film is stable, the deionized water is slowly removed with a peristaltic pump, and a single-layer close-packed polystyrene nanosphere film is ...

Embodiment 2

[0028] Similar to Example 1, the difference is that the diameter of polystyrene nanospheres is 100 nm, and the background vacuum is 8.0×10 -4 Pa, Ar + Ion beam current density 1.0 mA / cm 2 , and the etching time was 5 min. The average diameter of nanospheres in the non-close-packed ordered polystyrene nanosphere template is 54 nm, the distance between two nanospheres is 46 nm, and the etching rate is 17.32 nm / min.

Embodiment 3

[0030] Similar to Example 1, the background vacuum is 3.0×10 -3 Pa, Ar + Ion beam current density 2.0 mA / cm 2 , and the etching time was 14 min. The average diameter of the nanospheres in the non-close-packed ordered polystyrene nanosphere template is 120 nm, the distance between two nanospheres is 80 nm, and the etching rate is 11.43 nm / min.

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Abstract

The invention relates to a preparation method of a non-dense ordered polystyrene nanosphere template, and belongs to the technical field of preparation of nanometer structures. The preparation methodspecifically comprises the following steps of after a silicon wafer is cleaned, passivating the surface of the silicon wafer by hydrogen; self-assembling a single-layer dense polystyrene nanosphere thin film on the silicon wafer, and utilizing normal incidence type Ar<+> ion beams to bombard the nanosphere thin films of different diameters, wherein the density of beam flow is 0.85 to 3.0mA/cm<2>,the energy of Ar<+> is 0.5 to 1.0keV, and the bombarding time is 5 to 28min; after bombarding by the ion beams, the diameter of each nanosphere is reduced, and the location of each nanosphere is not changed, so as to obtain the non-dense ordered polystyrene nanosphere template. The preparation method of the non-dense ordered polystyrene nanosphere template has the advantages that the size and cycle of the nanoparticle in the template are adjusted by the initial diameter and bombarding condition of the polystyrene nanosphere; the etching rate of the nanosphere is adjustable within the range of6.19 to 17.32nm/min; compared with the ion beam etching technique, the etching rate is low, and the quality of the small-size polystyrene nanosphere template is favorably controlled; the cost is low,the technology is simple, and the stability is high; the non-dense ordered polystyrene nanosphere template can be applied to the study and development fields of ordered nanowires, nanorods, nanoporesand nanomesh arrays.

Description

technical field [0001] The invention relates to a method for preparing a non-close-packed and ordered polystyrene nanosphere template, which belongs to the technical field of nanomaterial preparation. Background technique [0002] Realizing the controllable preparation of nanomaterials is the direction that people have been working on, and the emergence of ordered nanostructures has promoted its development. Therefore, the study of ordered nanostructures has become the leading field and hot direction of nanomaterial synthesis research, and is the key to promote the application of nanomaterials. The preparation of ordered nanostructures requires corresponding templates, and the currently used templates mainly include: anodized aluminum oxide (AAO) templates, photolithography templates and nanosphere templates. Compared with AAO templates and lithography templates, nanosphere templates have the advantages of low cost and high output, and are favored by people. At present, or...

Claims

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Application Information

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IPC IPC(8): B82B3/00B82Y40/00
CPCB82B3/00B82Y40/00
Inventor 杨杰杨宇王茺张明灵翁小康王荣飞邱峰
Owner YUNNAN UNIV
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