Atom air chamber preparation device and preparation method with quantitative filling of alkali metal
A technology of atomic gas chamber and preparation device, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve the difficulty of ensuring the filling amount and uniformity of filling, which is unfavorable for mass production of atomic gas chamber, alkali Problems such as metal waste, to achieve the effect of avoiding waste, reducing waste, and avoiding deposition
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[0053] Below in conjunction with accompanying drawing and specific embodiment the present invention is described in further detail:
[0054] Such as figure 2Shown is the schematic diagram of the composition of the device of the present invention for the quantitative filling of alkali metal atoms in the atomic gas chamber. The device of the present invention for quantitative filling of alkali metal atoms inside the atomic gas chamber includes an inflation and exhaust system, N atomic gas chambers 4, alkali Metal sub-packaging container 5, thermostat, TEC temperature control system, alkali metal generator, CF flange 6, vacuum valve for connecting the charging and exhausting system and alkali metal sub-packaging container 1, used for connecting alkali metal sub-packaging container And the vacuum valve 2 of the alkali metal generator, and the vacuum valve 3 used to connect the alkali metal sub-packaging container and the No. 1 atomic gas chamber.
[0055] The alkali metal genera...
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