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Non-evaporable type air intake agent material applied to high-precision vacuum device

A vacuum device, non-evaporative technology, applied in vacuum evaporation plating, metal material coating process, ion implantation plating, etc., can solve the problem of getter activity disappearance, improve the getter performance and reduce the probability of failure , good vacuum effect

Inactive Publication Date: 2018-08-28
XI AN JIAOTONG UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

Ti-Zr-Hf-V thin film is the non-evaporable thin film with the lowest activation temperature so far, and has excellent getter performance, but with the increase of activation times, the surface of the getter reacts with the active gas to gradually form a passivation layer, thus causing the activity of the getter to slowly disappear

Method used

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  • Non-evaporable type air intake agent material applied to high-precision vacuum device

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Embodiment Construction

[0011] The present invention is described in further detail below in conjunction with accompanying drawing:

[0012] refer to figure 1 The non-evaporable getter material suitable for high-precision vacuum devices described in the present invention includes a substrate 3, a non-evaporable getter Ti-Zr-V-Hf film 2 and a Pd film distributed sequentially from bottom to top 1, wherein the substrate 3 is stainless steel, oxygen-free copper or silicon wafer.

[0013] The non-evaporable getter Ti-Zr-V-Hf film 2 has a lower activation temperature, which is conducive to expanding the application range of the film, such as the previous non-evaporable getter such as Ti-Zr-V The thin film has an activation temperature of 220°C. Due to the high activation temperature, it cannot be used on the aluminum alloy pipe, which may easily cause deformation of the aluminum alloy pipe, thereby affecting the quality of the particle beam in the aluminum alloy pipe.

[0014] Coating a layer of Pd film ...

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Abstract

The invention discloses a non-evaporable type air intake agent material applied to a high-precision vacuum device. The non-evaporable type air intake agent material comprises a substrate, a non-evaporable type air intake agent Ti-Zr-V-Hf film and a Pd film distributed sequentially from bottom to top. Due to the Pd film in the material, the service life of the non-evaporable type air intake agent Ti-Zr-V-Hf film can be prolonged.

Description

technical field [0001] The invention relates to a non-evaporable getter material, in particular to a non-evaporable getter material suitable for high-precision vacuum devices. Background technique [0002] The original getter material has a high activation temperature, which greatly limits the application range of the getter material. Specifically, the activation condition of St707(ZrVFe) is to activate the getter film by heating to 400°C and maintaining the temperature for 45min, or to activate the getter film by heating to 350°C and maintaining the temperature for 24h [C.B,P.Chiggiato,Pumping characteristics of the St707nonevaporable getter (Zr 70V 24.6-Fe 5.4wt%, J.Vac.Sci.Technol.A14(6), Nov / Dec 1996(1996)]; the activation condition of the TiZrV getter film is heated to 220°C and Maintaining the temperature for 24 hours can fully activate the getter film [J.Meng, X.T.Yang et al, Research of TiZrV PumpingCoatings on the Inner Walls of Vacuum Chamber, Physics Procedia 32(...

Claims

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Application Information

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IPC IPC(8): C23C14/16C23C14/35
CPCC23C14/165C23C14/35
Inventor 王洁王盛高勇杜鑫
Owner XI AN JIAOTONG UNIV
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