Method for determining sensitive parameters of FeRAM (Ferroelectric Random Access Memory)
A technology for sensitive parameters and parameters, applied in static memory, instruments, etc., can solve problems such as uncertain device parameters and changes
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[0038] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
[0039] 1) The technical principle of FeRAM
[0040] When 60Coγ is irradiated, there will be interaction between γ-rays and ferroelectric materials to generate electron-hole pairs, and the electron-hole pairs introduce interface state trap charges in the gate oxygen and field oxygen through drift, diffusion and recombination. It traps charges with the oxide to form an additional electric field and recombination center, which changes the ele...
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