The present invention relates to a single particle effect
simulation irradiation device based on a
heavy ion cyclotron, belonging to the technical field of
radiation hardening. The device includes a
mixed beam switching module, a beam line beam expansion module, a diagnostic target chamber and an
irradiation target chamber. A beam current on-line monitoring module is provided in the diagnostic target chamber, and a beam current measurement module is provided in the
irradiation target chamber. They are all connected through pipelines. The
mixed beam switching module is used to quickly provide a
single ion beam current. After being expanded by the beam line beam expansion module, a large-area uniform
single ion beam current is obtained. The expanded
single ion beam current is irradiated onto the
device under test in the irradiation target chamber. During the irradiation process, the
fluence /
fluence rate and beam spot uniformity of the single
ion beam current are monitored by the beam current on-line monitoring module, and the beam current energy and
fluence rate are measured by the beam current measurement module. Using the device provided by the present invention can solve problems such as the generation of a large-area uniform beam spot, extraction to the irradiation target chamber for irradiation, and rapid sample change.