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mems galvanometer laser microdisplay

A technology of microdisplay and laser, applied in instruments, optics, optical components, etc., can solve problems such as image pincushion distortion, and achieve the effects of low cost, low energy consumption, and small size

Active Publication Date: 2021-08-06
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In an existing MEMS galvanometer micro-projection system, red light (red) and blue light (blue) use semiconductor lasers, and green light (green) uses frequency-doubled solid-state lasers. Its working principle is to output three-color lasers The light spot is first collimated (or converged) and then beam-combined before being incident on the MEMS mirror, reflected by the MEMS galvanometer and directly projected onto the display screen, but since the usual display screen is flat, the MEMS galvanometer scans a curved surface , leading to severe pincushion distortion in the image

Method used

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Examples

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Embodiment 1

[0130] Example 1: See figure 2 It is a structural schematic diagram of a MEMS galvanometer laser microdisplay in the first embodiment of the present invention. The structure and the structure of the MEMS galvanometer laser microdisplay in this embodiment figure 1 The structures shown are essentially the same. Since the divergence angles of semiconductor lasers in the fast axis and slow axis directions are different, in order to obtain a circular spot with good collimation effect, it is necessary to collimate the light beams in the fast axis and slow axis directions respectively. In this embodiment 1, the collimating and shaping optical system 2 (that is, the laser collimating and shaping optical path) is completed by a single irregular lens, and the single irregular lens is a cylindrical surface whose two front and rear faces are orthogonal, and the curvature is aspherical. The first surface 11 of the single irregular lens adopts a convex structure. In the direction of th...

Embodiment 2

[0131] Example 2: image 3 It is a structural schematic diagram of a MEMS galvanometer laser microdisplay in the second embodiment of the present invention. The structure of the MEMS galvanometer laser microdisplay in this embodiment is basically the same as that of Embodiment 1, the only difference is that the collimation and shaping optical system uses two lenses to realize the collimation and shaping of the laser beam, wherein the first lens is not Regular structure, the second lens is plano-convex structure. In Embodiment 2, the first surface 21 of the first lens adopts a rotating aspheric surface, and the surface 21 realizes the collimation of the fast-axis and slow-axis beams at the same time, so the shape of the beam emitted from the surface 21 is a collimated and parallel elliptical spot . The second surface 22 of the first lens and the first surface 23 of the second lens are all aspheric surfaces in the slow axis direction, and both (face 22 and surface 23) form a G...

Embodiment 3

[0132] Example 3: Figure 4 It is a structural schematic diagram of a MEMS galvanometer laser microdisplay in the third embodiment of the present invention. The structure of the MEMS galvanometer laser microdisplay in this embodiment is basically the same as in Embodiment 2, the only difference is that the collimation and shaping optical system uses three lenses to realize the collimation and shaping of the laser beam, and the three lenses all adopt a plano-convex structure. In Embodiment 3, the first surface 31 of the first lens is the same as the first surface 21 of the first lens in Embodiment 2, that is, the surface 31 can also realize the collimation of the fast-axis and slow-axis light beams at the same time . Both the second surface 34 of the second lens and the first surface 35 of the third lens are aspherical in the direction of the slow axis, and they form a Kepler telescope structure to realize beam expansion in the direction of the slow axis. The remaining faces ...

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Abstract

The invention discloses a MEMS vibrating mirror laser microdisplay, comprising: a laser light source, including semiconductor laser light sources such as green light, blue light, and red light, which are respectively used to emit green light, blue light, and red light beams; a beam combining system, including : A shaping lens group, at least used to respectively shape the green, blue, and red beams emitted by the laser light source; a beam combining mechanism, at least used to synthesize the shaped green, blue, and red laser beams into one beam; The MEMS vibrating mirror is at least used to reflect the RGB combined beams output by the beam combining system and form parallel beams or converging beams to enter the display unit; and the control unit is at least used to control the light intensity change of the laser light source and the operation of the MEMS vibrating mirror state. The image formed on the MEMS vibrating mirror laser microdisplay of the present invention has high fidelity, and also has the advantages of small volume, low energy consumption, low cost, good safety and the like.

Description

technical field [0001] The invention relates to a microdisplay used in a head-mounted display, in particular to a laser microdisplay using a laser light source and a MEMS vibrating mirror. Background technique [0002] A helmet mounted display (HMD) is a miniature device installed on a helmet to generate a visual virtual image for the helmet user. The helmet-mounted display was originally designed to enable the weapon system to quickly lock the target with the pilot's actions in air combat, thereby improving combat efficiency. After several decades of development, the scope of the head-mounted display has expanded from the initial military aspect to daily life (such as mobile phones, vehicle instrumentation displays). [0003] From the perspective of the optical system, the helmet display system is mainly composed of two parts, one is the micro-display system, and the other is the visual optical system. The micro-display system converts the video signal incident from the ou...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03B21/00G03B21/20G02B27/14G02B27/01
CPCG02B27/0101G02B27/14G03B21/008G03B21/2033G03B21/208
Inventor 李敏吴东岷沈文江
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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