Intelligent deposition system

Abstract

The invention provides an intelligent deposition system. The intelligent deposition system comprises a control assembly, a scanning module, a laser source, a drive mechanism, at least two first reflectors, a vacuum chamber, at least two first fixing platforms for fixing different source material target materials, and a base sheet used for depositing composite materials. The first fixing platformsand the base sheet are located in the vacuum chamber, at least two first fixing platforms are opposite to the preset areas of the base sheet correspondingly, the vacuum chamber is provided with a light passing part, and the preset included angle is formed by the laser source and the light emitting direction of the first reflectors. The drive mechanism is connected with the laser source so as to drive the laser source to move, lasers emitted by the laser source are selectively irradiated into one of at least two first reflectors, the first reflector is used for irradiating the lasers into the position corresponding to the first fixing platform in the vacuum chamber through the light passing part.

Description

technical field [0001] The invention relates to the field of composite material preparation, in particular to an intelligent deposition system. Background technique [0002] At present, there is a very large focus in the field of materials science on the research of composite materials, such as solar materials, the performance of these composite materials is mainly determined by their components. In order to study and optimize these materials, the usual method is to synthesize materials one by one. This exploration process is very time consuming. Therefore, it is very necessary to find an efficient and systematic method to explore and study composite materials. In this way, the research efficiency of composite materials, especially three-component or four-component composite materials that have not been fully developed and utilized, will be greatly improved. [0003] In 1995, Xiang Xiaodong and others invented a combined method for the preparation of composite materials. ...

AI Technical Summary

Problems solved by technology

It brings a series of problems, such as phase separation, mask misalignment and process complexity, etc.

These problems have not been solved, and gradually become the fundamental problems of this method

[0006] However, pulsed laser deposition has a very prominent disadvantage, which is the non-uniform growth rate, that is, the film thickness will not be uniform everywhere on the substrate.

However, in this invention, the non-uniform growth rate of pulsed laser deposition is used to synthesize the material, so that the composition of each point on the substrate is different

Images