Semiconductor structure and production method thereof
A manufacturing method and semiconductor technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, transistors, etc., can solve problems such as affecting the quality and performance of SRAM, affecting the feature size of semiconductor structures, and unstable LDD feature sizes, and achieving a short process cycle. , Prevent glue residue, good active effect
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[0028] see Figure 1 to Figure 5 , showing a structural diagram corresponding to each step in a method for manufacturing a semiconductor structure. The method for manufacturing a semiconductor structure includes: providing a first substrate 10 in which a first isolation structure 100 is defined. and an active region (the schematic diagram is omitted in the figure); a first gate structure 12 is formed on the first substrate 10, and the first gate structure 12 covers part of the first substrate 10, usually, in the A first dielectric layer 11 is also included between the first substrate 10 and the first gate structure 12, and the first dielectric layer 11 may be a tunnel oxide layer or a mixture of a high-K insulating layer and a metal layer. layer, the material of the first gate structure 12 may be polysilicon; a first sidewall 13 is formed on the two side walls of the first gate structure 12, and the material of the first sidewall 13 is silicon nitride ,Such as figure 1 shown...
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