A kind of carbon nanotube double-sided adhesive and its preparation method and application
A carbon nanotube, double-sided tape technology, applied in the direction of carbon nanotubes, nanocarbon, nanotechnology, etc., can solve the problems such as the preparation process of carbon nanotube double-sided tapes that have been studied, and achieve excellent adhesion strength and good application prospects. , good adhesion effect
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[0040] The preparation method of a kind of carbon nanotube double-sided adhesive provided by the embodiment of the present invention comprises the following steps:
[0041] S1 prepares carbon nanotube materials with a certain height and density, which realizes the control of the height and density of carbon nanotubes by controlling the gas content, growth time and growth temperature, specifically including the following sub-steps:
[0042] S11 uses the magnetron sputtering method to sequentially coat an alumina buffer layer and an iron catalyst film on the surface of a substrate (such as a silicon wafer). The silicon wafer is surface-polished with a size of 0.5cm×0.5cm. The diffusion effect and Ostwald ripening effect have a crucial influence on prolonging the life of the catalyst and the size of the iron particles;
[0043] S12 Place the substrate coated with an alumina buffer layer and an iron catalyst film in a tube furnace with hydrogen, and heat it up to the required grow...
Embodiment 1
[0055] (1) Use magnetron sputtering method to coat alumina / iron catalyst on the surface of single-sided polished silicon wafer, wherein the alumina buffer layer adopts radio frequency reactive sputtering, the sputtering power is 200W, and the sputtering time is 60s; the iron catalyst film adopts DC sputtering Sputtering, sputtering power 20W, sputtering time 30s, the final prepared alumina buffer layer thickness is 10m, iron film thickness is 2nm;
[0056](2) Carbon nanotubes are prepared by water-assisted chemical vapor deposition, wherein the total gas volume (including argon, hydrogen and carbon source) is 650 sccm (standard milliliters per minute), the carbon source feed rate is 100 sccm, and the hydrogen gas feed rate is 100 sccm. 300sccm, argon flow rate 250sccm, growth temperature 780°C, growth time 4min, the prepared carbon nanotube material has a height of 350μm and a density of 50mg / cm 3 ;
[0057] (3) The upper and lower surfaces are etched using a plasma generator...
Embodiment 2
[0065] The steps are the same as in Example 1, except that the liquid environment in step (4) is an ethanol solution. The specific adhesion test results are shown in Table 1. As can be seen from Table 1, the carbon nanotube adhesion sample prepared by the present invention can still maintain the stability of the adhesion state after soaking for 4 hours. It can be shown that the adhesion strength at this time is 100N / cm 2 , indicating that the carbon nanotube double-sided adhesive prepared by the present invention can maintain a good working ability in an ethanol solution, and can maintain an adhesion state for up to 5 hours.
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